Basic Type/Direct Mount Type

B Counter bore depth C T T Y HT HP P (Piping port) (Operating direction: A) L 0 -0.1 22 8 Note 1) TC X F 14 WP 19.5 12.5 D 30 13 WS GP GW 4 x LD PW QW Plug 12.5 P (Piping port) (Operating direction: B) 2 x 4 x MM Thread depth M Switch rail HR HS CR W K Plug G G Z + Stroke Q + Stroke CY3RG15 P (Piping port) (Operating direction: B) CY3RG25, 32, 40, 50, 63 Note 1) 50, 63: L 0 0.2 CY3RG10 B

10

03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

Modular Type Air Filters Series AF

14 19 21 Z 28.5 38.5 42.5 H -2 3.5 3.5 P 44 46 54 AR20 AR30 AR40 Accessories Panel Mounting Nut (Optional) AR20P-260S AR30P-260S AR40P-260S Mounting Bracket Kit (Optional) AR20P-270AS-X48 AR30P-270AS-X48 AR40P-270AS-X48 Model AR20 AR30 AR40 D E 2 A C F IN OUT AA H P J Q V S W K U T Bracket and Mounting Nut (Optional) PANEL FITTING IN OUT X Z Y Plate Thickness AR20, 30: Max 3.5 AR40: Max 5

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Applicable bore size [mm] A1 D1 E1 L L1 MM ND NX NZ R1 U1 Split pin size Flat washer size Flat washer: Polished round MM Y-04D 40 22 10 24 55.5 55 M14 x 1.5 12 16+0.3 +0.1 38 13 25 3 x 18l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 14 28 55.5 60 M18 x 1.5 12 16+0.3 +0.1 38 15 27 3 x 18l Polished round 12 D1 Y-08D 80 37 18 36 76.5 71 M22 x 1.5 18 28+0.3 +0.1 55 19 28 4 x 25l Polished round

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 440 Series MGZR Double Power Cylinder/ Without Non-rotating Mechanism Dimensions Basic style GA GB 2 x P (Rc, NPT, G) Y Y MM depth M D1 KA D C B 2 x 4 x J MC NA NB MA MB KA C B K H S + Stroke ZZ + Stroke MGJ MGP MGQ MGG MGC (mm) MGF Stroke range Bore size (mm) H J B MM D1 K M MA MB MC NA NB P S Y ZZ D C KA GA GB MGZ 20 25 32 40 50 63

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected.

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

CNS

+ l + Stroke MLGP Long stroke RLQ Rc BQ plug with breathing hole BC element 4-J CL 2-MA Thread effective depth R MLU AL FA A K H GA F GB Rc BP Unlocking port GR GL T G G 2-Rc P Cylinder port (For NPT port) MM ML1C Q DD EA RY E LY LH V -X 4-LD Width across flats KA 20VA BN S + Stroke N RT N X X Y Y LT LX C B Data LS + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL

Cylinder with Lock

(Rc, NPT, G) Rod end cylinder port GA GD GC GR GL GL1 T Width across H P (Rc, NPT, G) Head end cylinder port flats KA With bellows K A AL Width across 4 x J 2 x Cushion valve 10.2 f l GB F flats B1 MM 4 x LD e E D C B LY LH V H1 LT N BN LX h + l X Y X Y S + Stroke LS + Stroke ZZ + Stroke ZZ + l + Stroke C B Z Long stroke (50 to 100) 1001 stroke or longer When stroke is 1001 or longer, tie-rod

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

AC Servo Motor Driver (Network card type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Symbol Connection target (application) Description Supply the following power to L11 and L21.

E-ITV-STD-RF-A

( Sel ect t he m enu w i t h or keys, t hen j um p t o anot her i t em . ) Lock keys ( ref er t o P8) Rel at i on bet w een set t i ng and sensi t i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y D ef aul t : 14 The di spl ay can be set t o zero agai n by execut i ng "zero cl ear".

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9

VDW

4 11 34 15.5 30.5 33 16.5 19.5 20 4, 6 14 17 35 Port size M5/M6 Grommet Y W 2 x 3.4 Mounting hole U X U1 X1 D Q F 300 Full wave rectifier (AC type) R E C (mm) Model Port size P B B1 E C D F 20 VDW1 VDW2 M5(M6) 20 10 46 15 9.5 11 2 x P Port size B1 M5(M6) 22 11 51 9.5 13.5 B Mounting bracket dimensions Electrical entry Model Port size P Grommet U U1 X1 Y W X Q R 39 VDW1 VDW2 28 14 17 17 M5