06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type), Manifold Individual Supply: w/o Option, Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.), Exhaust Interference Prevention Valve: W

High Purity Fluoropolymer Needle Valve Series LVN 1

S) D H VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN A port LVC 2-G LVA LVH SMC LVD SMC (J) C LVQ LQ E LVN TI/ TIL PA F K B port E PAX PB A B C D E F G H J K S LVN20 LVN30 LVN40 Model 48 60 72 2.4 7.5 8.0 18 24 30 20 26 33 14 25 25 4 5 6 6 9 11 34.5

Title not found

La2 (224)9.45 (240) 1008 (2s6) 10.71 1272) 11.34 \28) 11.97 (304) L, 0.31 (8) 0.94 (24) 1.57 (40) 2.20 (56.) 2.43 (72) 3.46 (88) 4.0s 004) 4-72 (120) c.5c (136) 5.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) s.50 \zt1) 9.13 1232) 9.76 \248) 103S \tu) 1'1.02 (280) 11.5 (296) 5 Port Solenoid Valve r{v23000 Symbol Body pond fyp NVZ320 Base mounted Type wnh subplat NVZ3140 NV23220 d L / t \ t k

7.4

For mixed single and double wirings, enter -K to the order code options.

NAR Series

2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A t e n n o B C D A r e b m a h C F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A , C D A F A 2 C A F A 2 C A F A 2 C A F A 2 C A e d i u g e v l a V F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A , C D Z F A 2 C A F A 2 C A F A 2 C A F A 2 C A ) f g k

Series VS

/10w SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 2 PORTS A,B, PORTS 2-1/8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5 PORTS D D **I 37 **I 39 F J 4 14 2 12 E K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Type), 1st Nominal Nozzle Size: 2 (ø1.0), 1st Selection Supply Valve and Release Valve: K (N.C.

Round Lock Nut), 1st Nominal Nozzle Size: 2 (ø1.0), 1st Selection Supply Valve and Release Valve: K (N.C.

Screwdriver Operation Type), 1st Nominal Nozzle Size: 2 (ø1.0), 1st Selection Supply Valve and Release Valve: K (N.C.

Operation Type), 1st Nominal Nozzle Size: 4 (ø1.5), 1st Selection Supply Valve and Release Valve: K (N.C.

Size: 4 (ø1.5), 1st Selection Supply Valve and Release Valve: K (N.C.

Nozzle Size: 4 (ø1.5), 1st Selection Supply Valve and Release Valve: K (N.C.

Supply Valve and Release Valve: K (N.C.

06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break Flow Adjustment Needle Screwdriver Operation Type)

Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 10 (ø1.0), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [