Air-hydro Unit

17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Flat washer 8 7 7 10 25.5 29.5 + Stroke 4.5 36 34 + Stroke 25 19 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth 12 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 4) 2 x 5.4 through 52 12 1 28 40 Flat washer 10 7 7 10 5 32.5 + Stroke 28 37.5 + Stroke 40 Note 1) Standard strokes available in 5 mm increments.

CNA

D-A44 D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) Auto switch HW A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs 31.5 56 A 36 B 36 Auto switch Auto Switch Mounting Height Proper Auto Switch Mounting Position D-G59F D-F59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-B59W D-A59W D-F5NTL Auto

MY2

An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 36 Series MY2 Actuator Precautions 1 Be sure to read before handling. Design Selection Warning Warning 1. There is a danger of sudden action by air cylinders if sliding parts of machinery are twisted, etc., and changes in forces occur. 1.

Compact Cylinder with Air Cushion

7 28.5 M6 x 1.0 10 20 L CU CW RR 40 22 18 36 7 28.5 M6 x 1.0 10 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 50 28 22 44 8 33.5 M8 x 1.25 14 Refer to page 11 for details on rod end nut and accessories.

ARM10/11

The pressure switch offers dual unit representation in MPa and PSI. 14-4-36 19 Series ARM11A/B Compact Manifold Regulator Common/Individual Supply Type DIN Rail When only DIN rail is required: DIN rail part no. AXT100DR n Note) Put an appropriate No. from the table below in the place of n. For the L dimension, please refer to Dimensions.

RQ

7 28.5 M6 x 1.0 10 20 L CU CW RR 40 18 36 7 28.5 M6 x 1.0 10 22 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 7-7-14 for details on rod end nut and accessories.

CXT

Reed switch Solid state switch A B HS D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-A7H D-A80H 32, 40 D-F7, D-J79W D-J79, D-F7BAL D-F7W, D-F79F D-F7NTL Auto switch model D-A7H D-A80H A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 9.5 13.5 32.5 36 6.5 9 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 Long Stroke Bore size (mm) 32 40 10 13.5 32.5 36 18 24 10 13.5 18 24

CNA

D-A44 D-A44C G 1/2 (Applicable cable O.D. 6.8 to 11.5) Auto switch HW A 49.5 B G 1/2 (Applicable cable O.D. 6.8 to 11.5) Hs 31.5 56 A 36 B 36 Auto switch Auto Switch Mounting Height Proper Auto Switch Mounting Position D-G59F D-F59F D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-F5 D-J5 D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-B59W D-A59W D-F5NTL Auto

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

36 41 20 74 65 90 50 20 8-8-27

DOC1001322

Piping port size Table 3.4-1 Piping port size Description Port size Recommended Recommended piping tightening torque specifications Circulating fluid outlet port Rc1 36 to 38Nm 1.0 MPa or more Circulating fluid return port Rc1 36 to 38Nm 1.0 MPa or more 1.0 MPa or more Automatic fluid fill port Rc1/2 20 to 25Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID

HRX-OM-W060

Description Port size tightening piping torque specifications Chiller side 1 union 178 to 185Nm Circulating fluid outlet port Filter side Rc1 1 36 to 38Nm 1.0MPa or more CH1 Circulating fluid return port Rc1 2 36 to 38Nm 1.0MPa or more Tank drain port Rc3/4 2 28 to 30Nm Chiller side 1/2 union 64 to 70Nm Circulating fluid outlet port Filter side Rc1/2 1 20 to 25Nm 0.8MPa or more CH2 Circulating

HRX-OM-W032

Table 3-11 Piping port size Description Port size Recommended Recommended piping tightening torque specifications Circulating fluid outlet port Rc1 36 to 38Nm 1.0 MPa or more Circulating fluid return port Rc1 36 to 38Nm 1.0 MPa or more 1.0 MPa or more (Automatic fluid fill pressure: Automatic fluid fill port Rc1/2 20 to 25Nm 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

Electric Actuator Miniature Rod Type Miniature Slide table Type

If when only the actuator is purchased separately, confirm that the combination of the controller, which you have and the actuator is compatible. / See 6.3 Caution(1) on p.36 (1) Check that actuator label for model number.

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5