VZ1000

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

EX510

Unit type Compliant sensor 1 2 N P B 1 connector, 2-input type NPN output Replaceable fuse (EX9-FU10) 1 connector, 1 input type PNP output 2-wire type Note) B (2-wire type) is available with 1 connector, 2-input type only.

Pressure Relief 3 Port Valve with Locking Holes

) Exhaust (OUTEXH) Model IN, OUT EXH C(dm3/s-bar) b Cv C(dm3/s-bar) b Cv VHS20 1/8 1/8 4.0 0.41 1.1 3.7 0.42 1.1 1/4 5.8 0.31 1.4 3.8 0.42 1.1 6 VHS30 1/4 1/4 8.8 0.44 2.4 8.0 0.46 2.3 3/8 14.1 0.28 3.5 7.8 0.46 2.2 1/4 9.5 0.49 2.8 13.3 0.47 3.6 VHS40 3/8 17.2 0.47 4.8 13.6 0.47 3.7 3/8 1/2 26.7 0.29 6.3 13.4 0.43 3.7 -6- 4.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

IZx-OMP0064

1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: Pneumatic fluid power General rules relating to systems JIS B 8361: Hydraulic fluid power General rules relating to systems JIS B 9960-1: Safety of machinery Electrical equipment of machines (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc *2) Labor Safety

Digital Flow Switch (Integrated display type)

) Model A B P PF2M701/702/705/710/725/750-01(-L) 66 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-N1(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4

HRX-OM-X037

(B contact). Contact output signal 3 WRN alarm selects N.O. (A contact) or N.C. (B contact). (1) (2) (3) Setting of contact output signal 1 to 3 Table 5.4-28 Setting of contact output signal 1 to 3 No.

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -37No.PS-OMY0007-A [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

for one piece) E3 03 R S AMR 4 0 00 02 E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch

Digital Flow Switches

8 + Load 2 Switch output 12 to 24VDC White 4 3 7 Black 4 (43.5) A 3 1 5 Blue PF2A5--1 (mm) A B Output specification Sensor unit Display unit (PF2A30/31) Pulse output only 42 62 Brown 52 72 Pulse output + Analog output 1 6 2 Analog output Main circuit Main circuit 8 4 2 Load + 12 to 24VDC Switch output White Black 4 7 3 43 2-3.4 Flow direction 3 5 1 Blue PF2A5--2 PF2A511, 521, 551 B Wiring

Manifold Specifications

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

KJ

(inch) Model H1 (Width across flats) H2 (Width across flats) T (M) Mounting hole M Min. port size Connection thread R Weight (g) L1 L2 Mounting plate thickness 7 mm or less 30 31 36 3 16 KQ2E07-02 KQ2E05-01 17 17 1 8 28 32.5 35 M16 x 1 17 11.5 14.5 15 14.5 14.5 18.5 M22 x 1 74 M14 x 1 M14 x 1 15 15 16.5 17 18.5 4.6 17 17 19 24 3.5 1 4 1 4 3 8 Applicable tubing 5 16 KQ2E09-03 19 6 3 8 21 KQ2E11

VZ3000

Gasket DXT192-10-5 (Use caution to the orientation.) 3-3-30 5 Port Solenoid Valve Base Mounted Series VZ3000 Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A /B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) b C [dm3/(sbar)] Cv C [dm3/(sbar)] Cv b Grommet 125 (75) 170 (120) Single Double Closed center Exhaust center

ZQ-OM01301

(October 1999) Vacuum ejector system Manifold ZZQ108A-B S C-A (1) (2)(3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 1) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 1) If the standalone product does not have the energy saving function, select

HRX-OM-R028

HRX-OM-R028 Contents Contents Chapter 1 Read before using. 1-1 1.1 Communication mode and operation method .1-2 1.2 Communication port.1-3 1.3 Key operations.1-4 1.4 Parameters .1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication .2-1 2.1.1 Precautions wiring communication. 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2 Communication

HRX-OM-S010

HRX-OM-S010 Chapter 1 Read before using Contents Chapter 1 Read before using . 1-4 1.1 Communication mode and operation method . 1-5 1.2 Communication port . 1-6 1.3 Key operations . 1-7 1.4 Parameters . 1-9 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication