, Semi-Standard, Sensor/Switch Specifications: EB [Vacuum Pressure Switch: 0 to -14.5 (0 to -101), PNP 2 Outputs, w/Unit Switching Function], Pressure Switch Lead Wire: G [Lead Wire w/Connector & Connector Cover, Lead Wire Length 78.8" (2m)], Vacuum Port: Straight ø5/32" One-Touch Fitting, Option: Screwdriver Handling Type Vacuum Break Needle

Push Type, Sensor/Switch Specifications: P1 [Pressure Sensor: 0 to -14.6 (0 to -101), Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø5/32" One-Touch Fitting, Option: -

Push Type, Sensor/Switch Specifications: EB [Vacuum Pressure Switch: 0 to -14.5 (0 to -101), PNP 2 Outputs, w/Unit Switching Function], Pressure Switch Lead Wire: G [Lead Wire w/Connector & Connector Cover, Lead Wire Length 78.8" (2m)], Vacuum Port: Elbow ø4mm One-Touch Fitting, Option: -

Manual Override: Locking Type, Tool Required, Semi-Standard, Sensor/Switch Specifications: EAP [Vacuum Pressure Switch: 0 to -14.5 (0 to -101), NPN 2 Outputs, w/Unit Switching Function (Initial Value psi)], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: Bracket for Single Unit - Not Assembled

Type, Sensor/Switch Specifications: EB [Vacuum Pressure Switch: 0 to -14.5 (0 to -101), PNP 2 Outputs, w/Unit Switching Function], Pressure Switch Lead Wire: G [Lead Wire w/Connector & Connector Cover, Lead Wire Length 78.8" (2m)], Vacuum Port: Straight ø4mm One-Touch Fitting, Option: -

, Tool Required, Semi-Standard, Sensor/Switch Specifications: EB [Vacuum Pressure Switch: 0 to -14.5 (0 to -101), PNP 2 Outputs, w/Unit Switching Function], Pressure Switch Lead Wire: G [Lead Wire w/Connector & Connector Cover, Lead Wire Length 78.8" (2m)], Vacuum Port: Straight ø4mm One-Touch Fitting, Option: Bracket for Single Unit - Not Assembled

ISO Cylinder

, 25, 40, 50, 80, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

Air Cylinder

101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5 34.5 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 1.5 8.5 16 28 40 16 2 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 6 2 8.5 17.5 21.5 35.5 D-C7l/C80 D-C73C D-C80C 10 2.5 9.5 17 29 41 16 3 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 4.5 11.5 19 31 43 16 5 11 19.5

CJ2

71 70 71.5 89 88 87.5 47 46 47.5 D-A7 D-A80 101 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F 10 17.5 100 D-A7/A80 16 20.5 101.5 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL D-F7BAVL 10 23.5 D-A73C D-A80C 10 3.5 10 17.5 29.5 41.5 16 26.5 D-F7V/F7BAVL 10 16 10 16 10 16 20 23 23 26 19 22 D-F7WV 16 4 9.5 18 30 42 72 48 90 102 D-J79C 10 16 0.5 1 7 6.5 14.5 15 26.5

CJ2

10 to 15st Bore (mm) Auto switch model 126 to 150st B 76 to 100st 101 to 125st 16 to 30st 31 to 45st 46 to 60st 61 to 75st 101 100 98.5 101.5 35.5 40.5 41.0 34.5 39.5 40.0 33.0 38.0 38.5 41.0 41.5 47 46 44.5 47.5 71 70 68.5 71.5 89 88 86.5 89.5 6 10 16 6 10 16 6 10 16 10 16 8.5 9.0 8.5 7.5 8.0 7.5 6.0 6.5 6.0 9.5 9 17.5 16.5 17.0 16.5 15.5 16.0 15.0 14.0 14.5 17.0

C85

30 22 G 1/8 10.2 M22 x 1.5 M10 x 1.25 25 32 15 8 15 50 12 16 8 17 10 22 11 28 20 11 33.5 S Z ZZ XC Bore 1 to 50 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153

C85

30 22 G 1/8 10.2 M22 x 1.5 M10 x 1.25 25 32 15 8 15 50 12 16 17 8 10 22 11 28 20 11 33.5 S Z ZZ XC Bore 1 to 50 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 1 to 50 101 to 150 51 to 100 101 to 150 51 to 100 8 82.5(88.5) 94.5(100.5) 64.5(70.5) 104.5(110.5) 10 82.5(86.5) 94.5(98.5) 64.5(68.5) 104.5(108.5) 12 95(98.5) 111(114.5) 70(73.5) 125(128.5) 16 153

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

to 101 kPa 10 to 101 kPa 10 to 101 kPa 0.1 to 1 MPa Set pressure range 0.1 kPa 0.1 kPa 0.1 kPa 0.001 MPa Setting/Display resolution Note 1) If the Vcc and 0 V side of the sensor input connector are short circuited, the inside of the controller will be damaged.

C76

Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89 151 to 200 201 to 300

C76

-45 to 6-10-46.

Table of Contents

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

MGP

12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50

Environment

Nil Without cable 2 2 5 5 A 10 !

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

, Ripple (p-p) 10% or less (with power supply polarity protection) 40 mA or less NPN or PNP open collector: 2 outputs (selectable) 80 mA 28 V (with NPN output) 2 V or less (with load current of 80 mA) 2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000 and 2000 ms) 0 to 101 kPa 10 to 105 kPa Maximum load current Maximum applied voltage Residual voltage

CV/MVGQ

26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q QY Bore size (mm