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AC coil: No more than 10% of the rated voltage. 2 Energizing in a long run For use of long run energizing, the continuous energizing time should not exceed 30 days and the valve must be operated at least once per 30 days.

NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022SMC Corporation All Rights Reserved 30

In power saving mode 2, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode. (Power saving is only enabled in measurement mode). In power saving mode 2, a decimal point flashes and moves across the display.

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

Please use caution and do not apply a stress of 30 N or greater. Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently tightened. Caution *Connector cable should be mounted in the correct direction.

SS secondary remelt Electropolish + Passivation 35 0.24 Hastelloy C-22 316L SS 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) Elgiloy 316L SS 25 0.17 PTFE (Option: PCTFE) PTFE (Option: PCTFE, Vespel) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30

V R 3 READY POWER OUT VALVE OUTPUT DC24V OV COM SOL.a SOL.b +24V SIG OV 1.15-38 Balance Controller Series VY511/VYU5 Dimensions Valve VY511-020 SOL.a SOL.b w q Adjustable flow controller for setting Rc1/8 Gauge port AN120-M5 Manual relief button AC 14 9.4 21.2 52 89.8 101.8 119 101 110.3 AV 26 44 56.8 57.8 60 62.8 AU 11.8 13.8 AF 25 (37.5) 92 3-Rc(PT)1/4 10.5 (37.5) 22 30 37 68 97 105 Manual

(Changeable) Sensor type Switch Set pressure range Hysteresis Repeatability Reed Solid state 26.6 to 79.8 kPa 17% full span 23% full span 1% full span or less 3% full span or less 12 to 24 VDC (Ripple 10% or less ) Temperature characteristics Operating voltage 5% full span DC10 to 26V AC100V Open collector 30 V, Max. 100 mA ON-OFF output Open collector 30 V Max. 80 mA 1 point Setting points

36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

Relationship between Minimum Operating Flow and Fixed Orifice Size 50 40 M8 0.5 5.0 Connection thread size for the pad Fixed orifice size (mm) Minimum operating flow (l/min (ANR)) Q2 30 N = 6 (unit) 20 10 0 5 10 15 20 25 30 35 Q1 = 31 l/min (ANR) Suction flow (l/min (ANR)) The above selection example is based on a general method under the given selection conditions, and may not always be

Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

(page 30) for details of the PIN layout 1 and 2. EX600-EU1End plate at U side Mounting method Symbol Description Nil No DIN rail bracket 2 With DIN rail bracket (EX600-ED#-2) 3 With DIN rail bracket (EX600-ED#-3) -27No.EX-OMX1011 Summary of Product parts EX600-ED2EX600-ED3EX600-EU1No.

If the sub display is switched during the arbitrary display setting, the display will be returned to the arbitrary display 30 seconds later.

. : If a button operation is not performed for 30 seconds during the setting, the display will flash.

30 70 150 220 2,905 MHL2-32D1 120 198 318 3,820 32 20 MHL2-32D2 160 242 402 4,655 MHL2-40D 30 100 188 288 5,270 MHL2-40D1 160 246 406 6,830 40 20 MHL2-40D2 200 286 486 7,905 ) (mm) 10 16 20 25 32 40 (MPa) 0.15~0.6 0.1~0.6 () -10~60 (mm) 0.1 () (N) 0.5MPa 14 45 74 131 228 396 () 10,16,20,25 40mm 32,40 80mm 4 - 3. 3-1 3-2 3-3 1 ISO VG32 5 - 3-4 Nm mm Nm mm MHL2-10D M4X0.7 1.4 5

-63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250