Air Cylinder Series MB 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 47 50 1/4 31.5 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11 279 M8 x 1.25 55.5 63 31.5 197 8.5 3/8 12 48 251 3.6 56 93 80 7 M18 x 1.5 55 58 23 12 27 14 296 M8 x 1.25 61.5 80 38 245 10.5 3/8 12 55 305 4.5 72 106 100 10 M22 x 1.5 61 72 33 14 30 14 361 M10 x 1.5 69.5 100 38 265 10.5 1/2 14 65 329 4.5 89 123
With temperature sensor PF3W504/520/540/511-;-;T Remote sensor unit: With temperature sensor 3-Color Display Digital Flow Switch for Water PF3W 11 AA 11 AA A A (mm) A AA Model PF3W704/504-;-;T PF3W720/520-;-;T PF3W740/540-;-;T PF3W711/511-;-;T PF3W721/521-;-;T PF3W721/521-F12-;T PF3W721/521-F14-;T 81 50 89 54 3-Color Display Digital Flow Switch for PVC Piping 109 71 135 92 115 74 119 76 123
Made to Order Dimensions Water resistant [mm] A B DA FA FB 50 st or less Over 50 st and up to 200 st Over 200 st Bore size [mm] 20 66 90.5 123 66 (10) (8) 21 25 67.5 91.5 123.5 67.5 (10) (9) 21 32 87 105.5 141.5 71.5 (14) (10) 24 40 87 105.5 141.5 78 (14) (10) 24 50 99.5 120.5 161.5 83 20 (12) 27 63 99.5 120.5 161.5 88 20 (12) 27 80 110.5 137.5 186.5 102.5 25 (16) 30 100 130.5 155.5 194.5
Troubleshooting . 121 9.1 CC-Link communication error . 121 9.2 Alarms and Warning List . 122 9.3 Alarm Display . 123 -3- LECSC Series / Driver Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
Connect each connector of Input unit, input blocks, and end block ( portion indicated by arrow in the figure to the right ). 35 Stations 1 2 3 4 5 6 7 8 44.2 110.5 123 148 173 185.5 210.5 223 248 100 112.5 137.5 162.5 175 200 212.5 237.5 12 12 12.5 12.5 13 13 13.5 13.5 82 102 122 142 162 182 202 222 L2 ( Rail mounting pitch: 12.5 ) L1 L3 (L4) (7.5) 5 60 DIN Rail 32.2 46.9 28 29 Applicable
Mass (kg) 1000 Standard stroke (mm) Model 800 600 500 400 300 200 150 REBH15 4.1 3.6 3.2 2.7 2.5 REA REBH25 9.4 8.0 7.3 6.6 6.0 5.3 REBHT25 14.6 12.5 10.4 9.4 8.3 7.3 6.2 REB REBHT32 18.8 16.5 14.2 13.0 11.9 10.7 9.6 REC Theoretical Output CY (N) CX Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.3 70 0.2 52 0.4 88 0.5 105 0.6 123 0.7 176 MQ 15 35 98 147 25 196 245 343 490
Optional specification Note 2) With barb fitting B With drain guide B Metal bowl B 85 123 166 166 200 200 276 292 293 Metal bowl with level gauge Model B AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 161 161 195 195 272 287 288 160 160 194 194 271 286 287 186 186 220 220 296 312 313 4 F.R.L.
D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Standard strokes (mm) Bore size (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 25 to 1000 50 to 1200 Note) Refer to the stroke selection Table in Technical Data 2, starting with page 123
MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF
X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 123 91.5 X22 200
Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 17 Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4
Stations L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 29 Series SYJ3000 Manifold Drawings Type 31 Manifold: Side Ported / SS5YJ3-31 Station M3 (mm) Grommet (G) , (H) 4-M5 0.8 (P, R port) 52.4(GZ:53.1) [
MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123
) (Conforms to MIL-C-24308) 2-C8 3(R) port n 1 2 3 4 5 6 7 Stations D-side 8 U-side DIN rail clamp screw 62.5 60 40.5 35 18.5 25 7.5 9.5 (7.5) (12) 2-C8 1(P) port 20.5 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 102 n: Stations (maximum 24 stations) n L L1 L2 L3 L4 2 66 123
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
) 45.5 46.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-1/4NPT 13.5 4-1/4,3/8NPT VH32 -N02/N03 (Bottom porting) 2 (A) 44 3 (R) 1 (P) 4-1/4,3/8NPT 4 (B) 5 Series VH Body Mount/Dimensions (mm) / Body mount type Dimensions VH40 -N02/N03/N04 VH40 -N06 Scale: 35% 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) 1 (P) 3 (R) 102 88 102 89 46.6 46.6 81 88 94 144 144 97 97 123
SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure
Purple LSB 1bit Gray 2bit Orange Output power supply voltage to pressure sensor Brown Black Input signal from pressure sensor Pressure sensor 10bit input Blue Blue Pressure sensor DC (GND) Common(GND) Note 1) IC1 (PNP open collector output type) Note 1) Connection to the pressure sensor is required only when using the external sensor type. 207 Series IC Dimensions Built-in sensor type 123
Fork insertion side Front side Fork insertion side Rear side 123 Series HRW Specific Product Precautions 2 Be sure to read this before handling. Refer to back page 1 for Safety Instructions and back pages 2 to 5 forTemperature Control Equipment Precautions. Mounting/Installation Caution Electrical Wiring Caution 1. Power supply and signal cable should be prepared by the customer. 2.
MENU Chiller energizing time at alarm accurrence is displayed Alarm occurrence number AL10 123 NO2 ENT Fig 1.3-4 Key operation (4/4) HRR Series 1.3 Key operations 1-7 HRX-OM-W004 Chapter 1 Read before using 1.4 Parameters Table 1.4-1 Communication setting menu Parameters explains the parameters of the communication setting menu.