LFE-OMZ0013

Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37 F20 External input 41

DOC1001322

Product Warranty HRS Series 9-2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

High Vacuum L Type Valve

XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

K35-OMW0030

C: May 2022 (Add auto start function) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 80

MX-OMP0051

NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 21

MONOSASHI-KUN WITH BRAKE CONTROLLER

(January 2019) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Cylinder with lock

Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.

Rotary Table: High Precision Type

35 How to change the auto switch detecting position 35 Auto switch operating angle and hysteresis angle 36 Operating range and hysteresis auto switch 37 Internal construction and component parts 37 Internal construction of rotary table with auto switch 39 MDSUA1/3 auto switch mounting 40 Maintenance and Inspection 40 Maintenance unit How to replace table unit / How to replace rotary unit 41

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Crack on the back of the belt 41 - 7.6 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1. Loosen the fixing bolts of end side of the Band holder. (The picture shows LEFB, but LEFS is same instruction as LEFB.)

JXCx-OMT0034CN

(CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC/TB . 20 .CN4 . 21 6.1 . 21 1 - 6.2 . 21 6.3 . 22 . 23 7.CN3 . 24 8.CN1IF (CONT) . 25 8.1 . 25 8.2 . 27 9.CN2TB/PC . 28 9.1 . 28 10.LED . 29 10.1 LED . 29 10.2 IF LED . 29 11. . 30 11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41

SI unit for DeviceNet TM

Specifications 41 Dimensions 43 Accessories 46 -1No.EX-OME0015-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

HRX-OM-M005

Figure 5-41 Serial Communication Setting Screen 2 [Tips] The setting has not taken effect while the box is flashing. 2. Touch the [Enter] key. The MESSAGE screen is displayed. Figure 5-42 Serial Communication Setting Screen 2 3. Touch the [YES] key. The setting takes effect.

LV50-OMQ0004

Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Operations . 39 8.1 Return to origin . 39 (1) Return to origin operation . 39 (2) How to command the return to origin . 40 8.2 Positioning operation . 41 8.3 Jog operation / inching operation . 42 (1) Jog operation . 42 (2) Inching operation . 42 8.4 Servo ON . 43 8.5 Response time for the controller input signal . 43 9.

EXxx-OMU0020EN

Wiring 41 7.4. Process data 41 7.5. LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1.

Multistage Ejector

ZL-OM00801 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2010 SMC Corporation All Rights Reserved 31 -