Series: VP300, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 3, Port Size: 1/4, Thread Type: -

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 10 Stations, Passage: 3 (P: Common, EA,EB: Individual, Port A,B: Side), Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 10 Stations, Passage: P: Common, EA,EB: Individual, Port A,B: Side, Port Size: 1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Stations: 10 Stations, Piping: P Common, R Individual, A Side, Thread: NPTF, Option: -, CE/UKCA Compliant: -

A_HEC-OM-K001

Host STX 47H Setting data ETX Check sum CR 103 102 101 100 (H) (L) Chemical Thermo-con ACK CR Host SOH UT STX 47H Setting data ETX Check sum CR 103 102 101 100 (H) (L) Chemical Thermo-con ACK UT CR Note) The setting range is from -100 to 0%.

Clean Room Rodless Cylinder Series CYP ø15, ø32

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Air Cylinder

Applicable bore size TX Rod trunnion Head trunnion CD LX LZ Z + Stroke Z + Stroke CS2 CM-B020 20 32 36 108 8 66 82 CM-B032 25 40 40 112 9 74 90 32 114 CM-B040 40 53 44.5 143.5 10 87 103 CM2U/CM2T (Rod/Head trunnion) Note) A pivot bracket pin and retaining rings are not included with the pivot bracket.

1

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

ZSM1-115/121

1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

Water-cooledThermo-chiller

Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)

SMC Pneumatic Clean Series

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

Digital Flow Switch (Integrated display type)

Display digits Upper digits Middle digits Lower digits Display unit Maximum flow display value L display [ U_1] 9 L 9 m3 x 103 999 m3 999 L (9 L) (999 L) ft display [ U_2] 9.9 ft3 999 ft3 x 106 999 ft3 x 103 999.9 ft3 (999. ft3) (999. ft3) : Operate only the product with unit selection function. button press.

Thermo-con

Cool from 30C (303 K) to 20C (293 K). : Clear water Density : 1 x 103 kg/m3 Specific heat C: 4.2 x 103 J/(kgK) Water bath Refer to the information shown below for the typical physical property values by circulating fluid.

SMC Pneumatic Clean Series

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

Series: 3 (VP300), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 12 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)