Electric Actuator

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RP 8150SZ Printed in Japan. D-SZ

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10,

AC Servo Motor Driver (CC-Link Type ）

TROUBLESHOOTING 101 to 10-15 10.1 Trouble at start-up . 102 10.2 Operation at error occurrence . 103 10.3 CC-Link communication error . 103 10.4 When alarm or warning has occurred . 104 10.4.1 Alarms and warning list . 104 10.4.2 Remedies for alarms . 105 10.4.3 Remedies for warnings . 10-13 10.5 Point table error . 10-15 11.

AC Servo Motor Driver (CC-Link Type ）

TROUBLESHOOTING 101 to 10-16 10.1 Trouble at start-up . 102 10.2 Operation at error occurrence . 103 10.3 CC-Link communication error . 103 10.4 When alarm or warning has occurred . 104 10.4.1 Alarms and warning list . 104 10.4.2 Remedies for alarms . 106 10.4.3 Remedies for warnings . 10-14 10.5 Point table error . 10-16 11.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103 149 Double C6 ( ) 6 One-touch fitting SY560--C6 Closed center 3 position 102 109 155 Exhaust center Pressure center Single 72 76 99 2 position Double 88 95 141 C8 ( ) Closed center SY560--C8 8 One-touch fitting 3 position Exhaust center 94 101

5 Port Solenoid Valve Series SV

) Internal pilot operating pressure range MPa (psi) 4 position dual 3 port valve 2 position double 0.1 to 0.7 (14 to 101) 3 position 0.2 to 0.7 (29 to 101) Operating pressure range 100kPa to 0.7 (14.5 to 101) External pilot operating pressure range MPa (psi) 2 position single, double 0.25 to 0.7 (36 to 101) 3 position 10 to 50 (with no freezing) (14 to 122) Ambient and fluid temperature C

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

SMC

0.5 thread depth 4 (With stroke adjuster at extension end) 2 (Stroke adjuster at retraction end) 23 40 15 30 37 10 3H9 depth 3 +0.025 0 12 F +0.025 0 N 1 x F 2 3H9 depth 3 30 24 M 0.5 23 24 Z ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101

42

B B B B B B VQC 4/5 7 SMC SMC SMC SMC SMC SMC SMC VQZ 6 SQ 5 VFS L1 L2 4 VFR 3 VQ7 2 44 P = 25 1 50.5 X Stations 12 Electrical entry on D side (LD) 47.7 80.8 D side 11.7 43.2 49.7 163 58.2 96.2 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 88 113 138 163 188 213 238 263 288 313 338 363 388 413 438 463 L2 101

Manifold Specifications

10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 L1 L2 Insert plug with lead wire: VV5ZS2-51GStation 1Port size 2-4.5 mounting hole Manual override 2n-Rc 1/8, 1/4 Indicator light U side (n) (2) (1) Stations D side 2-C6, C8 A 2 B 10.7 31.5 (Port size: One-touch fitting type) (Electrical entry) n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101

ZP

51 p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101

PSE200.eng

OUT2 ( ) ( ) ( ) ( ) For compound For vacuum For low pressure For positive pressure 101 kPa -101 kPa [Default setting] 101 kPa 1 MPa During the zero clear operation, pressure above 5%F.S. (2.5%F.S. for compound pressure) has been applied. After 2 s, the mode will reset to the measurement mode. The set values are displayed in auto-preset as follows.

Sensor Monitor

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2022 SMC Corporation All Rights Reserved. No.PS-OMU0012-C

Digital Flow Switch (Integrated display type) ( compatible)

[November 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2022 SMC Corporation All Rights Reserved No.PF-OMV0006-B

HRX-OM-X027

AC200-230V 50/60Hz 1Ph 16A REFRIGERANT R410A(HFC) 0.77kg (GWP:2088) The type and quantity of refrigerant (REFRIGERANT) WEIGHT 69kg (Net Weight) HRX-OM-X026 HRX-OM-X027 MANUAL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Front G MADE IN JAPAN (It is an example of model "HRS050-A-20-R".) THERMO CHILLER HRS030-A-20-R POWER SUPPLY SERIAL No.

DOC1023126

The motor was rotated while the initial data of the encoder was communicating (101) C Input RESET Turn the RESET ON when the actuator is stopped. This alarm occurs when an abnormality in communication with the encoder is detected when the power supply is turned on.

JXCx-OMX0009

Electric Actuators/Common Precautions . 100 19.1 Design and selection . 100 19.2 Mounting . 101 19.3. Handling Precautions . 102 19.4 Operating environment . 103 19.5 Maintenance Precautions . 104 19.6 Precautions for actuator with lock . 104 20.

JXCx-OMT0005CN

Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 100 2 ALM FG READY 3 0 OUT 1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 101 3 4-7 4byte 8-9 2byte 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM

JXCx-OMT0030CN

5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101