Thermo-con

heat C: 4.2 x 103 J/(kgK) Q = T x L x x C 60 x 1000 T2: Return temperature Customers machine L 0.8 x 3 x 1 x 103 x 4.2 x 103 = T =T2 T1 HEC 60 x 1000 H = 167W L Cooling capacity = Considering a safety factor of 20%, 167W x 1.2 = T1: Outlet temperature 200W Example 3 When cooling the object below a certain temperature in certain period of time.

3 Port Solenoid Valve Series VQ100 1

Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 9 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron

SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Digital Gap Checker ( compatible)

Description 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1(C/Q) -35No.PS-OMW0009-C 3 Installation Connector pin No. (Lead wire side) Connector pin No.

ALF400 to 900, ALT-5/-9

Description Material Note ALF400,400-06 ALF500/600 ALF800/900 Platinum silver painted Body Housing Aluminum die-casted Aluminum casted Aluminum die-casted q w Platinum silver painted Replacement Parts No. Description Material Part no.

25

Note 3) Refer to the operation manual for handling of the remote controller. 0 to 45C 35 to 80% RH (with no condensation) 33 g (excluding dry cell batteries) CE Ambient temperature Ambient humidity Weight Standards/Directive Construction IZS40 series y r t q e Description No.

1

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

MLGC

BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

The oil that has been pumped from the tank passes through felt q where it is filtered, and is fed into the case through nozzle w. When the volume of oil reaches a certain level, float e ascends, valve t descends via lever r, nozzle w closes, and the feeding of oil stops, thus completing the oil feeding process.

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

HRX-OM-M090

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-W058

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-R016

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-R005

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

A-HEC-OM-J004

Request message to read (from master) 02 30 31 52 50 56 31 03 65 Address BCC data End code Request to read Start code Identification code Response message from the product 02 30 31 06 50 56 31 30 30 32 35 30 03 06 Address BCC data End code Start code Numerical data Affirmation code Identification code Code Symbol/Data ASCII code Start code STX 02H Address 01 30H 31H Required content R

Precision Regulator

OUTPUT PRESS. 0.005 0.005 0.005 0.005 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR2000 IR2000 IR2000 IR2000-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range T T T To o o o G G G G MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no.

Precision Regulator

OUTPUT PRESS. 0.01 0.01 0.01 0.01 0.2MPa 0.2MPa 0.2MPa 0.2MPa IR3000 IR3000 IR3000 IR3000-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product code *** *** *** ***-*** *** *** *** Product number Max. supply pressure Set pressure range G G G G T T T To o o o MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN o Production lot no. Production lot no.