Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 Manifold ZZK2 04 A A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no option is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 Manifold ZZK2 04 A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no potion is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

AS-FG

ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

VQ7-6/7-8

VZ VF 1 2 4 VFR VP4 3 5 VZS 3' 5 3 VFS R1, R2 individual EXH spacer VV71-R2-03 Individual SUP spacer with residual pressure release valve VV71-PRVS4 02 03 VQ7 Thread type Thread type Rc Nil Rc Nil EVS NPTF T G F NPTF T G F VFN This is used by mounting on a manifold block in order to stop the inlet side supply pressure in an individual supply spacer, while at the same time exhausting the residual

KK/KK13

M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material Plug Description Material Socket Note Nickel

S Couplers Series KK/KK13

M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02 Socket Plug Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 G1/4 Hose I.D. 1/4" 5/16" 3/8" 1/2" Construction No. 1 Description Material Plug Description Material Socket Note Nickel

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Round Type Low Pressure Hydraulic Cylinder Series CH
M

(Band & Screw included) Auto switch models 25 32 40 Bore size (mm) 20 Bore size (mm) D-C7, D-C8 D-H7 D-B5, D-B6 D-G5, D-K5 D-A3, D-A4 Axial foot CHM-L032 CHM-L040 CHM-L020 CHM-L025 Flange CHM-F032 CHM-F040 CHM-F020 CHM-F025 20 BMA2-020 BA-01 BD1-01M When ordering the axial foot type, order 2 pcs. for each cylinder. 25 BMA2-025 BA-02 BD1-02M 32 BMA2-032 BA-32 BD1-02 40 BMA2-040 BA-04 BD1-

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

60

G H F SUP. SUP.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

The values in these tables indicate the maximum stroke that can be used in a situation when air is being supplied while the cylinder is stopped in an intermediate position by a) an external force acting on Series CHN Stroke range limit charts: Bore size 20, 25, 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F

Check Valve Series AK

Minimum operating pressure 0.02 MPa ASN Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000 02 0.5 MPa 0.7 MPa 0.5 MPa 0.3 MPa ASR 0.3 MPa 0.7 MPa