Do not use standard dew point 40oC (symbol L) type, standard dew point 60C (symbol S) type and IDG30A, 50A, 30HA, 50HA for dehumidifying breathing air. Do not use only outlet air (dry air) in a closed room. Find the purge air flow rate from the charts and calculate the required outlet air flow rate + purge air flow rate.
Safety Instructions Warning Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.
-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 With connector lead wire ZS-31-B With connector lead wire ZS-31-C : Spacers are included for 4 and 6 stations.
16 MT-S20 20 20 MT-S25 25 MT-S32 32 25 MT-S40 40 Replacement parts for rod end male thread.
Forward speed switch 16 forward speeds are available. SPEED Reverse speed switch 16 reverse speeds are available. !8 Forward acceleration switch 16 forward acceleration steps are available. ACCEL Reverse acceleration switch 16 reverse acceleration steps are available. CN1 Power supply connector Connect the power supply cable. !7 CN2 Motor connector Connect the motor connector.
Do not make any modifications to be product. Do not take the product apart. Piping Caution 1. Before piping Make sure that all debris, cutting oil, dust, etc, are removed from the piping. 2. Wrapping of pipe tape When screwing piping or fittings into ports, ensure that chips from the pipe threads or sealing material do not get inside the piping.
Do not remove any name plate or label. Do not drop, hit or apply an excessive shock to the unit. Follow the specified tightening torque. Do not apply any excessive force to cables by repeated bending, tensioning or placing a heavy object on the cables. Connect wires and cables correctly. Do not perform any wiring work while the power is on.
Do not use the valves in an atmosphere having corrosive gases, chemicals, salt water, water, steam, or where there is direct contact with any of these. 2. Do not use in explosive atmospheres. 3. Do not use in locations subject to vibration or impact. 4. Do not use in locations where radiated heat will be received from nearby heat sources. 5.
Do not operate in locations having an atmosphere of corrosive gases, chemicals, sea water, water or steam, or where there will be contact with the same. 2. Do not operate in locations having an explosive atmosphere. 3. Do not operate in locations where vibration or impact occurs. Confirm the specifications for each series. 4.
Do not use two or more rotary actuator with the aim of synchronized movement. One of the rotary actuator may bear the load of operation, making synchronized movement impossible, and possibly leading to deformation of the equipment. 16. Do not use in a location where adverse effect could be occurred by the oozing of the lubricant to the exterior.
16 29 Hs Hs 26 B A B A D-B5/B6/B59W D-G5NTL 12 24.5 24.5 Hs B A 33 Hs 33 A B D-H7C D-C73C/C80C CV MVGQ 16 16 Hs Hs B A 36.7 B A 36.7 Auto Switch Proper Mounting Position (Detection at Stroke End) and Mounting Height Auto Switch Proper Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C A D-H7 D-H7C D-H7W D-H7NF Auto switch model D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL Bore size (mm)
Consider a made-to-order product (-XC6) if the product is to be used in an environment where the generation of rust or corrosion will be a problem. 2) Do not expose the product to direct sunlight for an extended period of time. 3) Do not use in a place subject to heavy vibration and/or shock. 4) Do not mount the product in locations where it is exposed to radiant heat 5) Do not use in dusty
Operating Environment Do not use in an atmosphere having corrosive gases, or where there is direct contact with this. Do not use in dusty locations or where water or oil, etc., splash on the equipment. Do not use in a place subject to heavy vibration and/or shock. Speed Adjustment To make a speed adjustment, gradually adjust starting from the low speed end.
Do not use in direct sunlight. 3. Do not operate in a location subject to vibration or impact. 4. Do not mount the product in locations where it is exposed to radiant heat. 5. Do not use this product in an area that is dusty, or in an environment in which water or oil splashes on the equipment. 2-7. Lubrication Caution 1.
Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-113 for Precautions on every series. q u w e 1 3 LOW i o 2 4 r Selection !0 t Caution !1 1. Select the model taking into consideration the material suitable for the operating fluid.
Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Caution Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Be sure to read this before handling the products.
(Refer to "Mounting and Installation" on page 16.) Be sure to ground terminal FG when using a commercially available switch-mode power supply. Do not use in a place subject to heavy vibration and/or shock. Otherwise damage to the internal parts can result, causing malfunction. Do not pull the lead wire forcefully, not lift the product by pulling the lead wire.
Do not obstruct the exhaust port of the ejector. Do not cover the exhaust port. Otherwise, vacuum is not generated. Do not block the exhaust port to release the work piece. This can damage the vacuum ejector. 8.
energy 10 0.035 J 16 0.090 J : The above figure is for 16.
10 8 16 10 12 12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to 500 21 (mm) Bore size (mm) K MM NA NB NN P RR S T U V W Z ZZ IA 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 13.5