Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

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connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

RHC

D-C7 D-C80 D-C73C D-C80C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-A3 D-G39 D-K39 D-C73C D-C80C D-A44 D-G5W/K59W D-G5NTL D-G5BAL D-H7C Bore size (mm) Bore size (mm) HS B A B A B A B A B A B A HS HS HS HS RE A B 20 20 27 27.5 24.5 72 62 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

1

30 d (D) (C) (D) (C) H B H B Part no.

ZP3

B C D E Y q Pad dia.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

Environment

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

MXW Series Long Stroke Slide Table

127 152 177 202 4 MXW12 W 34 14 14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5 40.5 B 171.5 196.5 221.5 246.5 271.5 296.5 321.5 7 MXW20 W 51.5 26.5 26.5 26.5 26.5 26.5 26.5 V 185.5 210.5 235.5 260.5 285.5 310.5

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS1001F-23D-X214 AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-T AS-D AS-T ASP ASN AQ ASV AK VCHC ASS ASR ASQ 591

Wedge Cam Operation Provides

(V), D-F9B(V) Water resistant (2 color indication) D-F9BA MHK2-12l 12 4 Parallel opening/closing MHK2-16l 16 6 Standard model series MHK2 MHK2-20l 20 10 MHK2-25l 25 14 MHKL2-12l 12 11 MHKL2-16l Long stroke model series MHKL2 16 14 MHKL2-20l 20 18 MHKL2-25l 25 22 2.4-3 Wedge Cam Operation Slide Guide Air Gripper (2 Finger) Series MHK2 12, 16, 20, 25 How to Order Standard model F9NL S MHK 2

AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

MHK2

MHK2 Size: 12, 16, 20, 25 How to Order MHK 2 20 Standard type M9N S D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

MHZ2/MHZJ2

Mounting Type D-Y59 , D-Y69 , D-Y7P(V) A B A B Auto Switch Specifications Grommet D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59B D-Y7P D-Y7PV D-Y69A D-Y59A Perpendicular D-Y69B Auto switch part no.

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2