Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

104 57 59 51 93.5 100 63.5 58.5 114 65 70 58.5 104 114

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM Width across flats B1 H2 GA1 Cushion valve Cushion valve H1 D IA FY I B W Width across flats E Air release Air release Effective thread GB3 FT GA3 4-FD NA NB A K F S + Stroke FX 3 H ZZ + Stroke FZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B B1 B2 D E F FD FT FX FY FZ GA1 GA2 GA3 GB1 GB2 20 18 38 13 26 10 8 16 7 6 51

e-Rodless Actuator

However, when a stroke out of the standard 51 to 599 is required, add "-XB10" at the end of the model no. When stroke exceeds 600 mm, add -XB11 at the end of model no. Refer to page 23 for Made to Order. Applicable auto switches/For detailed auto switch specifications, refer to page 17 through 21. Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Auto switch part no.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600mm stroke, specify "-XB11" at the end of the model number.

MXW Series Long Stroke Slide Table

5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through hole 4.2 0 F E 5H9 +0.03depth 4.5 0 G F E Model J H GG Z N L K 82.5 123 91 MXW12-100 114 35 30 280 5 51

Mechanical Valves Series NVM, NVFM, NVZNI

Panel lMounting Panel N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51

Digital Flow Switches, Series PF2A, Series PF2W

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Sine Rodless Cylinder Series REBR Direct Mount Type

port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51

Digital Flow Switch Series PFA For Air Series PFW For Water

temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Pneumatic Transfer System Series MF

+ Static moment (M) Allowable dynamic moment (ME max) 1 Allowable static moment (M max) + Determination 3 3-Dimensional Transfer Single Unit Type Series MF Construction MF15 Material Note Parts list Material Note Parts list Description Qty. 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 4 2 4 2 2 2 9 5 Qty. 1 Description Cylinder tube No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 44 45 46 47 49 50 51

3 Port Solenoid Valve Series SYJ300/500/700

] Approx. 300 (Lead wire length) L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 Approx. 300 (Lead wire length) 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x 0.5 (A port) A A 13 10

5 Port Solenoid Valve, Series VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Dimensions (mm) Electrical entry A B C D E G H J Z Model Grommet Conduit DIN connector Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 58 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 68 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 76 26 62.5 47.5 60.5 50 62 58.5 70 103 94 7 Series VCW Dimensions (N.O.

VH Series, 4 Way Hand Valve

Dimensions VH21 -N02 VH31 -N02/N03 Scale: 40% 4 (B) 2 (A) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 74 62 62 49 2 (A) 49 45.5 46.6 62 134 97 125 94 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-1/4,3/8NPT 12 4-1/4NPT VH33 -N02/N03 (Bottom porting) 2 (A) Panel cut dimension 44 2A +0.3 0 1 (P) 3 (R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51

Rotary Cylinder Series MRQ

. + 5 95 (mm) E Mounting screw Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size Y 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

Compact Rotary Actuator Series CRQ2

switch Solid state switch Size Rotating angle Operating angle ( m) Hysteresis angle Operating angle ( m) Hysteresis angle B A B A 90 15 19 25.5 21.5 180 61 63 12 5 10 18 22 35 31 360 25 29 56.5 52.5 90 18.5 22.5 31 27 180 47 52 9 4 15 22.5 26.5 43.5 39.5 360 30.5 34.5 68.5 64.5 90 36 40 52.5 48.5 A 180 40 41 9 4 20 42 46 71.5 67.5 360 55.5 59.5 110 106 B 90 43 47 63 59 180 29 32 7 2 30 51