Compact Cylinder with Air Cushion Series RQ H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end
Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.
Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.
AP100 (13) Working principle When the MR units OUT side pressure is applied to piston q , piston q moves until it balances with the force of pressure adjustment spring w . The movement of piston q is detected by switch assembly e and outputs ON and OFF signals.
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
Basic (Through-hole/Both ends tapped common): CQUB F Q 2 x M5 x 0.8 Y 4 x M6 x 1 depth 10 4 x 5.4 through 15 KA H H1 Rod end nut Width across flats B1 NY EY D X C1 K NX A + Stroke B + Stroke L EX L1 Rod end male thread Basic (mm) Size Stroke range (mm) A B D EX EY F H K KA L NX NY Q Y 20 25 32 40 5 to 50 49 42.5 10 22 47 11.5 M5 x 0.8 depth 8 5 8 6.5 5.5 36 15 3 5 to 50 49 42.5 10 24 53 11
Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-41 Series VZ3000 Exploded View/DIN Rail Manifold Type 45 Manifold r w U side r q e w (b) Lever (a) Bolt (Both sides) e (a) Bolt (Both sides) Replacement Parts No. Part no.
No.IP8S-OM09 51 <(760) User operation setting> Line of 11 points curves defined by customer is set by operating actuator position.
Construction q t e r w IN Description No.
4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.
Switch assembly Adjusting screw Working principle When the MR units OUT side pressure is applied to piston q, piston q moves until it balances with the force of pressure adjustment spring w. The movement of piston q is detected by switch assembly e and outputs ON and OFF signals. The set pressure can be adjusted by turning adjustment screw r, which adjusts the spring force.
flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) 888 Series VEF/VEP Electro-Pneumatic Proportional Valve Pressure Type: VEP Diagram of Working Principle Flow Characteristics Current-Pressure Characteristics The horizontal axis of the characteristics represents the output amperage of the power
1 w i q !5 y 50, 63 Basic Type Description No. Material Component Parts Rod end male thread Note !
.0.8m) J L K [200VAC specification] [200VAC specification] Terminal block Power cable outlet(17) H P N M [100VAC specification] Power cable(Length:approx.1.9m) measure mm Model Port size A B C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF2E Rc3/8 51 232 138 24 327 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF4E / IDF6E / IDF8E, IDF11E A B
4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.
Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.
Align the ejector assemblies r, end block (R) w, and end block (L) e using positioning pins (at the two a positions) and fasten with a hexagon socket head cap bolts q (2 pcs.) (with a tightening torque of 0.6 Nm0.06 Nm). XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10
) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139
LEY LES Support guide (11-LEFG) LEPY LEPS How to Order LER LEH 200 S LEF 11 G 32 LEY -X5 q w e Clean series 11LEFS 11LEFS Support guide 11LEJS q Size w Type of mounting pitch e Stroke [mm] Symbol 11-LEFG16 11-LEFG25 11-LEFG32 11-LEFG40 Note 25A50 50 to to 1000 1000 16 25 32 40 S Ball screw drive Step motor/Servo motor (24 VDC)/AC servo motor LEC LEC S Applicable Stroke Table Ball Screw Drive
Switch assembly Adjusting screw Working principle When the MR units OUT side pressure is applied to piston q, piston q moves until it balances with the force of pressure adjustment spring w. The movement of piston q is detected by switch assembly e and outputs ON and OFF signals. The set pressure can be adjusted by turning adjustment screw r, which adjusts the spring force.