99

/Spare Parts and Seal List Hexagon head bolt Cover Seal w AIRVENT Gasket Clamp ring q Name plate Element Case Seal e Plug Spare Parts and Seal List Part number FGH100 FGH200 FGH300 No.

Speed Controller with One-touch Fittings Series AS In-line Type 1

AK ASS ASR ASF 15-9-11 3 Series AS Construction Component Parts No. q w e r t y u i o !0 !

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

Example) AW30-03C-2R-X2622A y t r e w q Stainless steel 316 specification Symbol Description K q Body size 30 40 IP K w Thread type Nil Rc N NPT F G + IW 02 1/4 03 3/8 04 1/2 06 3/4 + 1301 K e Port size AW AW IL1 K r Option i a Float type auto drain Nil Without option C Note 1) Float type auto drain (N.C.

P

Flat head screwdriver Construction AW30/40-B-X2709 AW60-B-X2709 o q r w i !0 q t w o OUT IN t u e y OUT IN y e r No.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

VER2000/4000

VER VEA 5 (R1) 4 (A) 1 (P) 2 (B) VY2 OFF state VBA VBAT F1 < F2 condition: See figure q. 2 (B) 3 (R2) AP100 4 (A) ON state Immediately after turning on F1 > F2: See figure e.

VCHR

9 12 Adjusting bolt Stainless steel q 13 Return spring Stainless steel @2 @3 14 Cushion Polyurethane elastomer !0 15 Poppet Polyurethane elastomer 16 Plate Steel + Electroless nickel plated @4 17 Spring Stainless steel !8 18 Guide ring Resin e 19 Guide ring Resin !

FH99

(Nominal size) Port size Hydraulic fluid Material 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 AL-128H AL-129H AL-131H AL-132H AL-134H AL-135H AL-136H AL-137H KA00813 (V120) AL-128H-V AL-129H-V AL-131H-V AL-132H-V AL-134H-V AL-135H-V AL-136H-V AL-137H-V KA00728 (V120) KA00815 (V85) KA00812 (V100) KA00813 (V120) KA00814 (V150) KA01800 (V175) KA00731 (V85) KA00727 (V100) KA00728

KP

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

51

Head Flange: CG3GN Bore size Stroke With rubber bumper Width across flats KA GA GB 4 x FD 8 x J 2 x P F R0.5 H1 0 E 0.05 MM D FX 0.15 0 E 0.05 I B C Corner of the cover (20 to 63) H A AL Width across flats B1 Width across flats NA F FT C FX 0.15 S + Stroke ZZ + Stroke B End boss is machined on the flange for E.

AD402/600

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

PFxx-OMX0002

Lead wire with M12 connector (ZS-49-A) M12 female Pin number Description M12 male Pin number 1 L+ 1 2 N.C. or Other 2 3 L3 4 C/Q 4 -97No.PF-OMX0002-B Revision history A: Contents revised in several places. [August 2022] B: Contents revised in several places.

PFxx-OMX0007

/Other Not connected/Analogue output or External input 3 Blue DC(-) 0 V 4 Black C/Q Communication data (IO-Link)/Switch output (SIO) -19No.PF-OMX0007-A Internal circuit and wiring examples NPN + Analogue output type PF3A7##H-CS/DS#-##-# Maximum applied voltage: 28 VDC Maximum load current: 80 mA Internal voltage drop 1 V max. CS: Analogue output: Select 1 to 5 V or 0 to 10 V.

Compact Proportional Solenoid Valve Series PVQ

(See q.) If current decreases at this point, the flow rate may not change by 135 mA due to hysteresis. (See w.) The flow rate at increasing current and decreasing current are not the same due to hysteresis. (q 85 l/min., e 93 l/min.) Condition 2. P1 = 0.7 MPa, P2 = 0.2 MPa Refer to curve B when P is 0.5 MPa.

VHS

Zinc die-casted Aluminium die-casted Material Note q Description Valve guide Body Chromated Chromated Chromated Selection w e Handle r Brass Valve Zinc alloy Caution 1. The valve must be switched to each position instantly and securely. Stopping the handle between the extreme positions may cause malfunction. 2.