Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

w e r t y u i o !

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

Solid State Auto Switches

voltage drop Indicator light Standard e None 2.4 V or less 0.8 V or less Red LED illuminates when turned ON.

MY2

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Magnetically Coupled Rodless Cylinder

0 i o q u y t r !2 w !1 CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 Parts list No. Description Material Note Hard anodized Aluminum alloy Body 1 Electroless Ni plated Aluminum alloy Head cover 2 Chromate (15 is not available.)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

0 i o q u y t r !2 w !1 CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 Parts list No. Description Material Note Hard anodized Aluminum alloy Body 1 Electroless Ni plated Aluminum alloy Head cover 2 Chromate (15 is not available.)

Environment

0 i o e r t q u !1 !2 !3 !

Electromagnetic Digital Flow Switch

Lead wire color *1 q q DC (+) 1 Brown w N.C./IN 2 Not used e DC () 3 Blue r INPUT 4 White (Flow sensor 1 to 5 V input) e w 1 2 3 4 r *1 When using the lead wire and M12 connector included with the LFElJ series. Do not connect black. Power supply/output connection lead wire Cable Specifications Pin no.

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

CXT

(NA) (NA) Q+Stroke MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG d Bore (mm) Standard stroke (mm) Slide Ball bushing (N) (NA) PA* PB PW Q A E F G GP H HG HN HP HT L MGC 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 00 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 MGF * PA dimension is the center sorted factor

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

F G H ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 14.2 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N 14.2 Applicable tubing diameter E 17.2 17.2 20 20 ZX 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DS-10-12-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

XLAQ/XLDQ

XM XY One-touch connection and release DXSA Removal procedure XVD r e w q Bonnet assembly XGT Handle Bonnet CYV Shaft Body 0.4 MPa 0.4 MPa 0.4 MPa Hold the bonnet to remove the bonnet assembly. Turn the handle counterclockwise to remove it. Push the handle downward.

Pin Clamp Cylinders

Contents Basic internal retaining ring MUB32-PS qPiston seal wRod seal eBumper Seal kit includes q, w, e. Since the seal kit does not include a grease pack, order the Grease Pack below separately. CLKU cannot be disassembled and therefore no seal kit is available. LGrease Pack Kit no.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

Power Clamp Cylinder

0 o q e !2 y i w r !1 Table 1 Replaceable Kits List Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !

RSH/RS1H

8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

RSH/RS1H

9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.