PF-OMM0004_C (60)[F 2]OUT2(36) -24No.PF-OMM0004-D 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(60)[F 2]OUT2(36) 30 (26) -25No.PF-OMM0004-D 2 [F 1] [F] 2 [F 1] OUT1 60 ON OFF 50% 5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*]
Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
(mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block 148 81 60 50 36 C 133 73 B D A Power cable outlet (17) (Wire diameter 9 to 11) IDF100F to 150F (mm) Dimensions A B C D Model 25 IDFA22E, 37E IDFA55E, 75E 135 81 46 A Dimensions (mm) 207 81 50 36 B 509 Model A IDFA100F IDFA125F
22 (0.15) to 150 (1.0) AT F (C) Ambient temperature 36 to 104 (2 to 40) Relative humidity of 85% or less Air flow capacity 37F (2.8C) 10 (17) 15 (25) 25 (43) 41 (70) 59 (100) 71 (120) Outlet air pressure dew point IDF IDU 45F (7.2C) 11 (19) 16 (27) 26 (45) 43 (74) 62 (106) 80 (136) Outlet air pressure dew point SCFM Note 1, 2) (m3/h (ANR)) 50F (10C) 12 (20) 17 (28) 28 (47) 45 (77) 65 (110
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38
h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.
h 9 l 16 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot In the case of w/o air cushion, it comes with rubber bumper.
Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 h 9 2 x 4-J N F l H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G
FX f~ Rod Ilange / (F) S1r,*-~ llin!1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .
Vacuum release Vacuum valve/Release valve SOL.a ON OFF SOL.b OFF ON When power supply is stopped vacuum valve/vacuum release valve will hold the operation. 13-3-36 36 Series ZR Large Size Vacuum Module: Vacuum Pump System Function Plate: ZR1-RV3 A function plate is used when each connecting port for the valve unit is common.
Note 1) In case of types with no air cushion, a rubber bumper is used. 4 Series MB Without Mounting Bracket Cushion valve Basic/(B) WV Port G 2-RcP MM G With rod boot E E D e MB Effective thread 2 x 4-J C B A K F N MA 13 9 f l N h S + Stroke H ZZ + Stroke Without air cushion Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.
Electric actuators / Common precautions . 35 5.1 Design and selection . 35 5.2 Mounting . 36 5.3 Handling . 36 5.4 Operating environment. 37 5.5 Maintenance . 38 5.6 Precautions for actuator with lock . 38 6.
a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP
VXH VXF R VX3 T VXA A SMC IN OUT N B 8 x 18 S Q D F (mm) Model Grommet DIN terminal Electrical entry Applicable flange A B C E F N Q R S D U T 90 (98) V U T 168 (176) 67.5 82 (90) 90.5 (98.5) 96 (104) 7 E VXD2 32A 29.5 67 35 160 55 22 51.5 135 12 100 36 98.5 (106.5) 104 (112) 179.5 (187.5) 192.5 (200.5) 8 F VXD2 40A 32 70 69.5 40 170 57.5 24.5 54.5 140 14 105 42 9 G VXD2 50A 32 77.5 69.5
flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20
With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32
Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement