DOC1001322

P.5-13 (14) Startup operation status display Displays the status of operation settings at startup P.5-14 (15) Anti-freezing status display Displays the status of anti-freezing settings. P.5-14 (16) Warming up status display Displays the status of the warm-up settings. P.5-14 Pump operation continuation status display Displays the status of pump operation continuation setting.

ZX

Model ZX1 J1 E P F Nil Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-J1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking)

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

HRX-OM-Y098

(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

HRX-OM-W060

P.5-12 (15) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (16) Operation mode P.5-12 Common or serial communication ( mode). (17) Operating condition display It indicates the run and stop status of the product. P.5-12 (18) Run/Stop To run/stop the product.

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

VH Series, 4 Way Hand Valve

25 3 (R) 3 (R) 1 (P) 1 (P) 25 17 2 4-1/4,3/8,1/2NPT 4-3/4NPT VH43 -N02/N03/N04 (Bottom porting) VH43 -N06 (Bottom porting) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-3/4NPT 4-1/4,3/8,1/2NPT 9

CNG

P-86.5 (JT)

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ

Refer to p.2.9-15 for How to Order for DIN rail.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

Cylinder with Lock Series CNG

mounting range GB A F K BN Rc(PT) P TB AL 2-TDe8 (pin O.D.)

PFxx-OMA1007

Body size Standby E/P regulator Standby regulator Residual Pressure Relief valve 20 EXA1-AC2 30 EXA1-AC1 EXA1-AC2 40 60 EXA1-AC1 -14No.PF-OMA1007-B Names and Functions of Individual Parts Air Management System (Standby E/P regulator type) No.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.

Industrial Filters

P.35 Maintenance and inspectionelement replacement in particular is easy. When used for a gas, the product is handled as a class 2 pressure vessel compliant special order product.

Vacuum Unit Ejector / Vacuum Pump System

Note 13) When D is selected, select P for (8) Options for the single unit model. Cannot be selected when (4) Wiring is N.