PFxx-OMS0001CN

[F 2] OUT2 OUT1 -41No.PF-OMS0001CN-A [F 3] <> [F 3] [RES][] [rES] [] [F 3] -42No.PF-OMS0001CN-A [F10] OUT1 OUT2 OUT1 OUT2 OFF <> [F10] [SUb][] [SUb] [] [F10] -43No.PF-OMS0001CN-A <> a. 500L/min =P_1 =N_1 =P1L =P1H =N1L =N1H -44No.PF-OMS0001CN-A <()> b. 9 L 3 1.5 6 3 9 L 9 F30(49 ) + 1 =0 =0 F20(47 ) 9 L 3 1.5 6 3 9 L 6 0 0 F30(49 ) + 1 = = 47 F20 -45No.PF-OMS0001CN-A

energy saving effect

Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude

CC-Link-E

The product i s adj ust ed t o each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory. Avoi d unnecessary di sassem bl y or rem oval of part s, as t hi s m ay cause f ai l ure. 3 CAU TI O N Take t he f ol l ow i ng m easures agai nst m al f unct i on due t o noi se. I nst al l a l i ne f i l t er i n t he AC pow er suppl y l i ne t o rem ove noi se.

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

CY1

M1 = F x L F A F F A L L L Opposite port side Guide central axis (single axis type) Port side For the dual axis type, this is the cylinder's central axis.

CLS

RT N N FX FZ BY S + Stroke H ZZ + Stroke BW With rod boot 180, 200, 250 BZ BV e BG BE f l 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Long stroke range (mm) B A AL BA BB BC BZ BV BW BP C D E EA F FT FX FY FZ GB GC FD H J K KA M GA BY BD BE BG BF 107 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8

ITV-E

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

39

G F 200.03 10 G 200.03 10 300.025 300.025 250.05 9 through 9 through H 300.025 300.025 I M61.0 H M61.0 150.03 150.03 I R45 500.05 6.5 6.5 18 10 30 3 10 3 18 R6 R6 R25 R25 19 19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA236M ACA237M ACA238M NAAMS code ACA246M ACA247M ACA248M A B C D E F G H I A B C D E F G H I Part no.

Modular F.R.L. Unit

5.5 7 7 9 9 M 3.2 4 4 4 4.6 N B 132 184 187 222 224 J 33 L 5.5 7 7 9 9 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 E 41.5 55 55 72.5 77.5 AC20C AC25C AC30C AC40C 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 2 Note 1) 50 71 71 88 88 45 50 50 75 75 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20 only, the position of the pressure gauge is

O

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

O

Avoi d carel ess di sassem bl y or rem oval of part s, as t hi s can l ead t o m al f unct i on. 3 CAU TI O N Take t he f ol l ow i ng st eps t o avoi d m al f unct i on due t o noi se. 1) I nst al l a l i ne f i l t er et c. t o t he AC pow er l i ne t o reduce / el i m i nat e pow er suppl y noi se. 2) Avoi d m al f unct i on due t o noi se by i nst al l i ng t hi s product and i t s w

HRX-OM-Q026

Set temperature 40.0 oC 5.0 to 55.0 oC (104.0 oF) (41.0 to 131.0 oF) (-)2 Circulating fluid Monitoring method AL03 discharge temp. 0 0 to 3 rise Monitoring start timer ---(0)3 0 to 600 minutes Range over detection timer 5 5 to 999 seconds 1: Values in F are displayed when SE12 is set to F. 2: Default value when AS03 is set OFF. 3: Default value when AS21 is set to either 2 or 3. 5.22 Alarm

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15/25 REBH15/25 REBH15/25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REBH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) REBHT25/32 REBHT25

Table of Contents

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

PFxx-OMO0004CN

[F 2] OUT2 OUT1 -43No.PF-OMO0004CN-E [F 3] <> [F 3] [F 3][rES] [rES][] [F 3] -44No.PF-OMO0004CN-E [F10] <> [F10] [F10][FLo] [FLo][] [F10] 3) 9 L(9.9 ft 3 3 3 50 L 60,008 L 203,481,019 L (57 ) (47 ) ((49 )) -45No.PF-OMO0004CN-E [F13] ON <> [F13] [F13][rEv] [rEv][] ON OFF() ON() [F13] -46No.PF-OMO0004CN-E [F20] [---] =00 = ONEEPROM 100+100 OFF <> [F20] [F20]

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

VZS

Plug-in F Note) A Single/ Double A side 5 24 VDC 2 2 position double 6 12 VDC G Grommet Grommet, With surge voltage suppressor 3 3 position closed center B Double B side 9 Other Option 4 3 position exhaust center GS 3A 3 position A side Option Electrical entry, Light/Surge voltage suppressor 5 3 position pressure center L L plug connector 6 3 position double check 3B 3 position B side

Vacuum Unit

VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

'i,-.1-)^' l z N F Noz l!

REA/REB

L1 Data n = 1 + 2 + 3 + 4 = 0.333 + 0.125 + 0.25 + 0.27 = 0.978 1 And it is possible to use. 10-2-79 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table due to Roll Moment Load Guide central axis (1 axis type) F F A F L L A L Guide central axis (1 axis type) Opposite port side M1 = F x L A M2 = F x L M3