Prevents Micro-Bubbles

) LVH A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations LVD 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVA 2 0 02 C A PA PAX Option Body class Nil 1 4 Symbol 2 3 4 5 None With flow rate adjustment With indicator Body class 2 3 4 5 Orifice dia. 4 8 12 20 PB Valve type 0 1 2 N.C.

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

VQZ1000/2000/3000

3/8) (For Rc 3/8) 33 3 4 5 3 4 5 L plug connector (L): VQZ3 50 1(R)-L-02 03 DIN terminal (Y): VQZ3 50 1(R)-Y-02 03 Indicator light 300 157 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 300 62 <67> 55 <60> 163.5 MAX.10 75 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 86 78.5 3 4 5 M plug connector (M): VQZ3 50 1(R)-M-02 03 60.5 (Lead wire length) Cover diameter

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

Flow Control Equipment

How to Order 02 B ASS 00 3 Accessory Without bracket With bracket Body size 1 8 1 3 5 6 8 3 B 3 4 1 AS Port size Applicable series Port size 01 02 03 04 06 10 ASN 1 8 Style ASS100, 110 ASS300, 310 ASS300, 310 ASS500 ASS500, 600 ASS600 1 4 00 10 Meter-out control Meter-in control AQ 8 3 1 2 PAT.PEND Meter-in style is available only for ASS110 and ASS310. 3 4 1 ASV AK Thread N F Rc(PT) NPT

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

3 Port Air Operated Valve

type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3

ASR

ASF Pressure Valve: Series ASR Dual Speed Controller: Series ASD Knob Knob F C Knob A Knob G 15-16-7 8 Series ASR/ASQ Construction Pressure Valve: Series ASR Variable type Fixed type @1 @2 @5 @4 @3 @1 @2 @5 @4 @3 ASR430F-02 type ASR530F-03 type ASR630F-04 type ASR430F-02 type ASR530F-03 type ASR630F-04 type u o !3 u o !3 !8 !9 !7 !8 !9 !7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Screen Display High-Precision Digital Pressure Switch for General Fluids ZSE20C(F)/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification Piping direction 1.5 02: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8

5 Port Air Operated Valve Series VFA3000 1

exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Modular Type Lubricators Series AL

Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard Nil 1 10 11 2 6 8 C 6C Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) a Bowl Note 2) Semi-standard + Without drain cock With drain cock Drain cock with barb fitting: For 6 x 4 nylon tube b Nil 3 3W Lubricant exhaust port + Nil R Flow direction Flow direction: Left to right

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

E-P HYREG ® Series VY1 1

8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Hydraulic

Series CHM Stroke range limit charts: Bore sizes 20, 25, 32, 40 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F Bore size 20 Bore size 25 1000 8 3 7 6 5 4 8 3 7 4 6 1 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 1000 3 7 6 8 6 4 8 3 7 4 5 5 1 500

VFA3000

Note 2) With sub-plate Note 3) { }: Normal position 1763 Series VFA3000 Dimensions: Body Ported 2 position single: VFA3122-F 01 02 2 x 4.5 (Mounting hole) 3 (Breathing port) Max. 3 (Pilot port) 2 x 18 (EXH port) 3 x , 18 14 (SUP , CYL port) 2 position single: VFA313001 02 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 2 x 4.2 (P , A, B port) (Mounting hole) 3 x , 14 18 3 (Breathing

Process Pump

Tubing size Symbol 19 Main fluid connection size 3/4" Thread type Note 2) Symbol Nil N F Type Rc NPT G With nut PAF541 S S 19 0 1 Actuation Note 1) Option Fitting type Symbol 0 3 Actuation Applicable actuation Automatically operated Air operated Symbol 1 3 Fitting type LQ1 LQ3 Automatically operated Air operated Symbol Option Nil N None With silencer For AIR EXH: AN20-02 (: Either Nil or