AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

Compact Vacuum Ejector Series ZQ

for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO

KQ2

1 8 1 4 3 16 3 16 5 32 1 4 3.5 16.5 3 16 1 4 5 16 4.6 17 1 4 3 8 K 3 8 6 18.5 5 16 1 2 Applicable tubing M 7 21 1 2 3 8 Note) D: Max. diameter H KK D MS Cross: KQ2TW Applicable tubing O.D.

IDX-OM-W020

80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36-104 F (2-40C) (85%) () 1 AC115V10% 60Hz (Note3) (2)

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

High Power Cylinder Series RHC

depth 25 M26 x 1.5 341 41 3/4 236 34 16 80 10 26 1206 High Power Cylinder Series RHC Dimensions: Axial Foot Style 20 to 40 GA 2 x Rc P H GB F K A F WH NN AL H2 MM H1 NE D LY 4 x LD LH LT NF E E JD N Width across flats KA 10 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) A AL D E F FL GA GB H H2 H1 JC JD K KA LD LH Bore size (mm) 20 43 18 10 30.5 15.5 14.5 5 16 8 11.5 7 53.5

Air Fittings Fitting Series For Special Environment

O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3

V

4O -0 Rotation Tolerance F I T T I N G L O C A T I O N A N D R O T A T I O N O F A U T O S W I T C H H O W T O O R D E R NCRB1BW R O TA R Y A C T U AT O R NCDRB1BW S A U T O S W I T C H L E N G T H O F L E A D W I R E D ...W/ Auto Switch Magnet ...Without Magnet Grommet 0.5m Lead W L Grommet 5m Lead W C Connector 0.5m Lead W CL Connector 3m Lead W CN Connector No Lead Wire M O U N T I N G

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

A

0.05~0.83MPa P R E S S U R E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D Rc(PT)* Remove (N) when ordering F F(PF) N NPT Courtesy of Steven Engineering, Inc. !

CV/MVGQ

M5 x 0.8 12.5 52.5 CC Single Acting, Spring Extend/Rod Side Flange Style (F) RB CVJ3F T Bore size Stroke 28 [34.5] 48 [49] J M5 x 0.8 M5 x 0.8 Width across flats B1 Manual override D-X Rod End Nut 20H1 B1 Bore size (mm) 10 16 Data 7 3.2 16 [17] S + Stroke H + Stroke Z + 2 x Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) HX H FZ

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

Magnetically Coupled

0 i q o u y !7 r !9 w !4 NCY3B6 NCY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) NCY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 NCY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Compact

o"o+ oeep 3 o Cross section C-C 3 l "!l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!