Environment

1 Controller/Driver type*1 !

Digital Flow Switch

210 L/min (Displays [ 0] when the value is between -1 and 1.)

Fluoropolymer Tubing Variations

8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

76

F (C) Correction factor 1.41 41 to 86 (5 to 30) Air ow capacity scfm (m3/min) (ANR) 50 Hz 565 (16) 709.8 (20.1) 882.8 (25) 50 (10) 1 1.21 95 (35) 60 Hz 663.8 (18.8) 836.9 (23.7) 953.4 (27) 59 (15) 1.4 1 104 (40) 61 (16) or more 1.5 0.92 113 (45) The maximum coefficient value is 1.5 due to the drainage separation performance. 0.75 122 (50) 0.63 131 (55) Data D: Inlet Air Pressure 0.53 140

Micro-Mist Separator with Prefilter Series AMH

37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm) Accessory AMH850 0: With auto drain (N.O. type) For AMH850 a: 3/88 female thread Optional Specification LL 0 T: With element service indicator 75 .

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24 27 27

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

60

Dimensions page 13 (Single unit) 9 Series VXK21/22/23 For Steam /Single Unit Model/Valve Specifications N.C. N.O. Passage symbol Passage symbol 2 2 1 1 Normally Closed (N.C.) Normally Open (N.O.)

Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series

PF2D

Minimum set unit Note 1) 0.05 L/min 0.1 L/min 0.5 L/min Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note 1) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse Real-time flow rate Accumulated flow L/min, gal (US)/min Display units Note 1) L, gal (US) 0 to 9 L, 0 to 9 gal (US) Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC

PFxx-OMO0004CN

2 2 5 00.75 MPa 1.0 MPa 3 5F.S.(00.75 MPa0.35 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -65No.PF-OMO0004CN-E PFMB7201 15 V420 mA 1 k 6 24 V 600 12 V 300 7 0.4 V () 30 msec. 8 9 L/mincfm 10 3 Lft -10210 L/min(-11 L/min [ 0]) 0999,999,999 L 1 L

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

MGZ Series

Selection Conditions: 1.

Series MXP Precision Air Slide Table

Allowable kinetic energy E max. : Table 1 Possible to use by E=0.0181 Load rate of moment Wa=W max. Calculate allowable load Wa(N). Wa=112=12 =1 W max.=12 1=2/12=0.167 Allowable load coefficient : Graph 1 Calcurate load rate (1) of moment.

Pneumatic Transfer System Series MF

Transfer Single Unit Type Series MF Construction MF15 Material Note Parts list Material Note Parts list Description Qty. 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 4 2 4 2 2 2 9 5 Qty. 1 Description Cylinder tube No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 44 45 46 47 49 50 51 52 53 54 55 56 57 58 Hard anodized Spring steel Special resin Stainless steel Stainless steel Stainless steel Stainless

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Refrigerated Air Dryer

60 2 to 25 30 32 35 40 45 1.1 1.1 1.30 1.41 1.06 1 1 1.25 1.16 1.21 1.02 AMF 0.91 0.97 1 1 1 1 0.83 0.89 0.83 0.8 0.92 0.99 ZFC 0.79 0.77 0.7 0.64 0.75 0.98 0.6 0.48 0.63 0.92 SF 0.53 SFD Data C: Inlet Air Pressure Data D: Air Flow Capacity LLB Inlet air pressure (MPa) Inlet air pressure (MPa) Air flow capacity (m3/h [ANR]) Correction factor Correction factor Model IDFA3E IDFA4E 24 IDFA3E

240

Aluminum alloy Aluminum alloy Magnetic material Carbon steel Urethane Urethane Carbon steel Brass NBR NBR NBR Carbon steel 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Note) The MXH series cannot be disassembled.