Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: 1/4" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 4 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 4 Stations, A B Port Size: 5/16" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 5 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 5 Stations, A B Port Size: 5/16" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: 1/4" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: 5/16" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 1/4" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 5/16" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 10 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 11 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 20 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Vacuum Unit

How to Order Valve Manifold Assembly t Option3 (For details on the Function/Application, refer to page 42.) Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

DOC1001322

Circulating fluid flow rate Circulating fluid flow rate . 5-12 Circulating fluid discharge pressure Press PV . 5-12 Compressor circuit High pressure side High Press. . 5-12 Compressor circuit Low pressure side Low Press. 5-13 Circulating fluid electrical conductivity DI PV . 5-13 Key lock condition display KEYLOCK . 5-13 Startup operation status display START UP . 5-14 Anti-freezing status

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8