Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upperlevel devices.

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Compact Cylinder with Air Cushion Series RQ

YA-03 Joint . YU-03 CQ2 RS RQ T2 V M W CQM Joint and Mounting Bracket (A and B Types) Part No.

RQ

YA-03 Joint. YU-03 Joint Part No.

High performance type Step Motor Controller (Servo/24 VDC)

The output current exceeded the specification (01-194) current E Power Over off An abnormality is detected by the current sensor that is checked when the controller is reset. A current sensor abnormality has occurred. (01-195) Make sure that the electric actuator conforms to the controller.

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

MNB

Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1

CLA

Cylmoer IS unlocked allln"le of shipment See page 9 lor notes and Instruc~ons 01 engagHlg lOCk unit.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

(Including Bracket, Screw, Set Screw) Applicable bore size [mm] 32 40 50 63 80 100 125 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded 2 Face seal fitting 3 Compression fitting 4 1 output in SIO mode (NPN or PNP switching type) 5 This function is not provided with the IO-Link compatible type. 3-Screen Display High-Precision Digital Pressure Switch ZSE20B(F)/ISE20B Series How to Order p. 13

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Including Bracket, Screw, Set Screw) Applicable bore size (mm) Cylinder series C96 32 BT-03 40 BT-03 50 BT-05 63 BT-05 80 BT-06 100 BT-06 125 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)

VCA

+ 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) IN port direction Model Dimension 9 348 359 384 395 404 415 448 459 7 278 289 314 325 322 333 366 377 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 3 138 149 174 185 158 169 202 213 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295

Compact Cylinder with Lock Series CLQ

Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.

Fieldbus system (PROFIBUS DP compliant)

(Only for EX510-S 01 ) -34No.EX-OMI0032-G No.

C95

6 5.4-41 -XC10 Dual stroke cylinder/Double rod !7 Made to order common specifications 5.4-46 -XC11 Dual stroke cylinder/Single rod !8 5.4-52 -XC12 Tandem cylinder !

C95

L3 d1 H9 MB1 Part no. d3 h KJ30D KJ35D KJ40D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 Refer to Page 6-16-1 for details on auto switches.

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

Brake mechanism added

41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

HRX-OM-W058

AL.01 Contact output 2 function Sets output signal function of contact output 2. RMT Contact output 2 operation Sets output signal operation of contact output 2. A Contact output 2 selected alarm Sets alarm which is selected for contact output 2. AL.01 Contact output 3 function Sets output signal function of contact output 3.

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type