LX

40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer

Mechanically Jointed Rodless Cylinder Series MY2

C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40

13

Vacuum Pad: ZPT P. 13-11-2 Large/Heavy Duty Type (40 to 125): ZPT/ZPX P. 13-11-72 Large Size Bellows Type (40 to 125): ZPT/ZPX P. 13-11-86 Ball Joint Type (10 to 50): ZPT/ZPR P. 13-11-104 Free Mount Cylinder for Vacuum: ZCUK P. 13-12-2 Drain Separator for Vacuum: AMJ P. 13-13-3 Vacuum System Peripherals: P. 13-14-2 Related Products: P. 13-14-13 Manifoid Specification Sheet P. 13-

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

15 169 149 1.1 2.4 11 14 11.

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Intrinsically Safe Valve

Manual override Insulator: Black () 13.6 B A Insulator: Red (+) 2 x 4.2 (Manifold mounting hole) 20 42 2 x 1/4" {A(4), B(2) port} 44 (E-type) (14) (52) 1.2 (2 x 4.2 mounting hole) 1.2 125 (49.5) 0.3 mm2 (42.5) 40 40 14.7 (39.4) 123.3 L (Lead wire length) 1/4" {P(1) port} 2 x 1/8" {EA(5), EB(3) port} 40 12.5 0.9 18 39.4 2 (23.9) EB P EA 36 2 x 2.2 (For manifold gasket positioning) (66) L-type

Compact Cylinder

Y-G02 Y-MU03 A1 8.5 12 L1 25 31 E1 18 L1 25 31 MM M8 x 1.25 M12 x 1.25 NDH10 8 10 MM M8 x 1.25 M12 x 1.25 E1 16 18 A1 8.5 12 Size 20, 25 32, 40 Size 20, 25 32, 40 +0.058 0 +0.058 0 NL 9 10 R1 10.3 4 NZ 16 22 NX 8 11 NO 20.5 24 U1 11.5 14 R1 10.3 10 NX 8 11 NO 20.5 24 U1 11.5 14 NDH10 NL 9 10 Part no. I-G02 I-MU03 Part no.

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

HRX-OM-R005

Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1

MK

to 53 Chrome molybdenum steel Replacement Parts: Seal Kits 32 40 MK2-40-PS 50 MK2-50-PS 63 MK2-63-PS Bore size (mm) Part No.

Compressed Air Preparation Filter

v*14 v*14 v*14 v*14 *1 The drain guide is either NPT1/8 (applicable to the AFF20, AM20, and AMD20) or NPT1/4 (applicable to the AFF30 to AFF60, AM30 to AM60, and AMD30 to AMD60).

HRX-OM-W038

40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

VQ7-6/7-8

SMC A B B A A PA L side L side R side R side 40(53) D side D side (2n-1/8) 2 14 82.5 59 17 34 82.5 154 (Single) 175.5 (Double) 62 154 (Single) 175.5 (Double) 94 180.5 175.5 (3 position) 4n-3/8, 1/2 180.5 175.5 (3 position) Bottom ported drawing 183.5 171.5 139 14 12 P PB PA 80.5 4-1/8 67 R2 R1 40(41.5) (Pilot pressure EXH port) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

KP/KPQ/KPG

KPQY12-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10

VQ7-6/7-8

Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA L1 38(27) L2 L2 L1 B A A B B A SMC A B B A A PA L side L side R side R side 40(53) D side D side (2n-1/8) 2 14 82.5 59 17 34 82.5 154 (Single) 175.5 (Double) 62 154 (Single) 175.5 (Double) 94 180.5 175.5 (

45

A: Orange B: Green 12 13 14 15 16 17 12 13 Stations n 10 stations 11 12 13 14 15 16 stations 298 310.5 323 335.5 335.5 348 360.5 L1 L2 L3 L4 287.5 300 312.5 325 325 337.5 350 (Rail mounting hole pitch 12.5) 192 202.5 213 223.5 234 244.5 255 14 15 16 17 11.5 12.5 13.5 1-6-125 Made to Order Specifications: Series SX3000/5000 Serial Transmission Type With OMRON Corps G71-OD16 45S3 Type Serial

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display