0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.

Filter Regulator

Structural Drawing and Replacement Parts 11-12 7. Bowl Assembly Specifications 13-20 8. Assembly of Optional Parts 21-22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-40 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-31 11-3. Element Replacement 32 11-4. Valve Assembly Replacement 33-35 11-5.

IDX-OM-W020

T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 13 13-1 . 13-1 IDFB Series 2 IDX-OM-W020 i i i 1 () OFF 3 ON OFF i 1 1 3 i-1 IDFB Series i 1 IDX-OM-W020 i i 2 5 i 2 1 i-2 IDFB Series i 2 IDX-OM-W020 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-2-2 IDFB Series i 3 IDX-OM-W020 i i 2 6 WARNING !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

JXCx-OMX0009

Mode . 40 9.1 Outline . 40 9.2 Step No. instructions operation function . 40 2 - 9.3 Position / speed monitor . 41 9.4 Operation by numerical instruction . 41 9.5 Data editing function . 42 10. Memory map . 45 10.1 Remote IO (Rx and Ry) . 45 10.2 Remote register (RWr and RWw) . 51 11.

EXxx-OMY0004

Fig. 11-2 Status indicators of the EX245-DX1 73 No.EX##-OMY0004 11.6.

EXxx-OMY0006CN

10-11 Bit 7 Ch3/7(3) Table 10-11 58 No.EX##-OMY0006CN 10.7.

Electric Actuator with Integrated Guide

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-11 5-11 HRX-OM-X010 Chapter 5 System Operation Unit of PUMP SP can be selected on Initial Setting screen 1.

MRHQ

45 42 69 8 Angle adjustment bolt 54 2-8.5 through 2-14 depth of counter bore 4 107 3-R3 +0.030 0 3-6H9 depth 8 (one each on three sides) 12 10 +0.030 0 3-6H9 long groove depth 4 (one each on three sides) M5 x 0.8 Port B M5 x 0.8 Port A 50h9 0 -0.062 4-M6 x 1 depth 10 I N J E A D P A A M N R SMC R E O P 17 P T 21.5 27.5 A I R R G Y 7 R A 8 17.5 I 32 8 48 42 Side A Side B 12-11-16 17 Rotary

Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

) 3-M3 X 0.5 thread depth 6 44 MDHR2-15E port position 42 B 45 120o 11 120o A C 36 M3 X 0.5 M3 X 0.5 Finger opening port Finger closing port 10 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25o 25o MHZ2 MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) MHL2 12h9 0 -0.043 Auto switch mounting groove MHR 1.5 .

PC Wiring System

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

VS7-6

B06 Bottom piping: 3 4 Ordering source area code Code Japan, Asia Australia areas E Europe N North America Dimensions Symbol Model VS7-2A03 A04 VS7-2B03 B04 VS7-2-A06 Port size Piping Side A B C D E F G H J K L M N O P Q R S T U V W X Y 62 4-M6 Depth 10 , 3 8 1 2 75 98 30 50 49 32 23 42 31 36 88 10 16 12 16 10 38 16 23 112 15.5 47.5 Bottom Side 4-M6 Depth 12 72 3 4 86 42 63 62 42 30 55 42

Precision Cylinder Series MTS

Refer to "Auto Switch Mounting Strokes for 8" on page 11. Refer to the standard stroke table on page 2. Rod end configuration End lock Nil R Without end lock With rear end lock Nil M Rod end female threads Rod end male threads Applicable auto switches/Refer to pages 14 through 18 for detailed auto switch specifications.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 3-2-9 Series VK3000 Base mounted (Side ported) Type 42 Manifold Grommet: G DIN terminal: D VV5K3-42Station -01 ~ = ~ = Solenoid

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Main circuit of switch OUT Black Mass (g) DC () Blue D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model 11 11 11 0.5 D-Y7PW, Y7PWV Lead wire length (m) 54 54 54 3 DC (+) Brown 88 88 88 5 Main circuit of switch Main circuit of switch Dimensions (mm) OUT Black D-Y7W M2.5 x 4 L Slotted set screw Indicator light DC () Blue 3.4 2.5 SMC SMC 6.2 5 D-Y7BW, Y7BWV 29 OUT (+) Brown Most sensitive position