LEC-OM02904 7 (2) No.PB4522 [Hz] PB45 No.PB45 0 2 2 [Hz] [Hz] [Hz] 0 1 2 3 4 5 6 7 8 9 A B C D E F 40.0dB 24.1dB 18.1dB 14.5dB 12.0dB 10.1dB 00 01 02 03 2250 1125 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D
(VJ324M) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] Solenoid valve N.C. (VJ114) K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Solenoid valve Release valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None [ ]: Mass (g) How to Order /Refer to page 866 for details.
(Refer to page 40, 41) Standby OFF delay 0 to 9s 0s Common Sensor Sets enabling/disabling of automatic isolation. (Refer to page 40, 41) Auto isolation Enable/Disable Disable Common Isolation delay Sets isolation delay. (Refer to page 40, 41) 0 to 9s 3600s Common Sets whether it is necessary to input the security code or not.
AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233
Refer to the how to order above. 1 Only bar is ordered, 41 cannot be selected. 19
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
OPTIONS AND AUXILIARY EQUIPMENT (b) Surge protector RAV-781BYZ-2 [Unit: mm] 1) 2) 3) Black Black Black 5.5 1 11 1 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 200 30 4.2 0.2 UL-1015AWG16 0 28 1.0 1 3 2 4.5 0.5 41 1.0 11 34 12. ABSOLUTE POSITION DETECTION SYSTEM 12.
cdptlon #11 Manitold glock *41 Manitold glock *'23 Manifold Block ir28 Manitold Block 1 g 1C 1 D H$?
For details, refer to page 10-20-40. 10-12-16 16 10-12-17 17 Stroke Reading Cylinder Series CE1 12, 20, 32, 40, 50, 63 How to Order CE1 32 200 L J79W Number of auto switches Mounting style Auto switch B L F G D Both ends tapped style (Standard) Bore size Nil Without auto switch Nil 2 pcs.
4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63
17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.
5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/
Press the [SEL] key 17 times. The set screen of drain pan set [Optional Accessories] is displayed on the digital display. PV SV 3. Select drain pan set [Optional Accessories] from the table below with [] key or [] key, and confirm by pressing SEL.
11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.
Symbol Port size Applicable series One-touch fitting for 5/32" N3 SX3000 One-touch fitting for 1/4" N7 SS5X3-41-05-C6 1 set (Type 41, 5-station manifold base part no.)
22 27 32 41 41 19.6 25.4 31.2 37.0 47.3 47.3 16.5 21 26 31 39 39 79.5 69.5 Note 1) When using cotter pin, flat washer is used together.
188 196 225 235.5 10 114.5 122.5 150 160.5 11 125 133 162.5 173 12 135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104 112 137.5 148 3 41 49 75 85.5 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 L1 L2 L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5)
CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2
CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2
Product Specifications . 15 3.1 Basic specifications . 15 3.2 Parts description . 16 3.3 Outside dimension diagram. 17 (1) Screw mount type (LECP6-) . 17 (2) DIN rail mount type (LECP6D-) . 17 3.4 How to install . 18 (1) How to install . 18 (2) Ground wire connection . 18 (3) Installation location . 19 4.