Air Cylinder

NCA325-13-Q6311 NCA325-13-Q6311 NCA150-13-Q6308 5008-131 NCA200-13-Q6309 5008-93 NCA150-31-Q6308 NCA150-31-Q6308 NCA325-31-Q6311 NCA325-31-Q6311 NCA150-31-Q6308 Available only as an Assembled Item. Please see below for How to Order Seal Kit. Available only as an Assembled Item. Please see below for How to Order Seal Kit. Available only as an Assembled Item.

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

CRBB-OM00004

Assembly / Disassembly procedure 12 4.1 With vertical auto switch unit 12 Size 10, 15 12 Size 20, 30 13 Size 40 14 4.2 With angle adjustment unit 15 4.3 With vertical auto switch unit and angle adjustment unit 16 Size 10, 15 16 Size 20, 30 17 Size 40 18 5.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Plate Cylinder with Lock Series MLU

13 13 13 13 Different side(s) 20 Same side 75 D-A79W 13 14 13 14 2 pcs. 1 pc. 5 5 10 5 15 10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F 20 Only size 40 and 50 can be mounted. 7 6.5 6.5 6.5 D-F7LF 7.5 7 5 7 7 5 D-P5DWL Hysteresis specifications are given as a guide, it is not a guaranteed range.

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

SFOD-OMT0009CN

) (14) 1 PWR LED() ON OFF 2 RUN LED I/O USB 3 USB USB LED USB USB 4 ALM LED 5 USB USB 6 C PWR 2 (+)(-) 7 I/O 1 I/O 40 I/O PLC 8 I/O 2 I/O 40 I/O PLC 9 ENC1 (16 ) 1 10 MOT1 (6 ) 11 ENC2 (16 ) 2 12 MOT2 (6 ) ) (+)1 (+) 1 (+)2 (+)2 (+) 13 CI 1 2 ) 1 2 (+)(-) 14 M PWR 1 2 15 ENC3 (16 ) 3 16 MOT3 (6 ) 17 ENC4 (16 ) 4 18 MOT4 (6 ) ) (+)3 (+) 3 (+)4 (+)4 (+) 19 CI 3 4 ) 3

Air Cylinder

Basic 20 22 46 39 66 Axial piping 17 22 46 39 66 Double clevis (including clevis pin) 24 54 43 74 Head-side bossed 20 23 48 40 68 Additional weight per 15 mm of stroke 2 4 7 4 7 Basic weight (When the stroke is zero) Single foot 8 8 25 8 25 Double foot 16 16 50 16 50 Rod flange 5 5 13 5 13 Head flange 5 5 13 5 13 Mounting bracket weight : Mounting nut and rod end nut are included in the

Mini Free Mount Cylinder

(Compared with the CU series cylinders, double acting, without magnet) CU Dimensions (Without Magnet) (mm) CUJ Bore size (mm) A(a) B(b) C(c) 4 6 8 10 12 16 20 10 ( ) 13 (13) 13 ( ) 13.5 (15) 17 ( ) 21 (20) 25 (26) 15 ( ) 19 (22) 21 ( ) 22 (24) 26.5 ( ) 29.5 (32) 36 (40) 13 ( ) 13 (33) 13 ( ) 13 (36) 15.5 ( ) 16.5 (30) 19.5 (36) b B c + Stroke C + Stroke A ( ): Dimensions of the CU series

SFOD-OMT0010

(13) BUSY output is turned ON. (14) DRIVE input is turned OFF. (15) INP output is turned ON. (16) BUSY output is turned OFF.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 Series SYJ500

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Refer to the construction drawing of the actuator motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area. (2) When installing electric actuator LEY(G) or LEF series with an auto switch by side, leave a gap of 40 mm or more with respect to the position where the magnet passes.

C95

12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H

Air Cylinder Series MB

W 32 40 50 63 80 100 22 30 35 35 40 40 27 125 to 1000 50 223 97 15 17 120 1/2 38 M27 X 2.0 13 M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18

C95

54 19.5 22 G 1/8 7.5 46 97 45.5 12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

EX120/121/122

0.2 40 40 70 0.2 80 80 PWR 2 x M4 Mounting hole Bracket 9 16.3 Shown with cover removed. 60 Bracket (accessory for EX510-DX1) Mounting example 1 Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0