30

Hexagon Socket Head Male Connector: KQB2S (M5) Applicable tube O.D.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

Rotary Clamp Cylinders

Moment of inertia (kgm2) 102 MK2T20/25 Mounting bolt 103 Operating range Flat washer Note) Be sure to use a flat washer to mount cylinders via through-holes. 104 50 100 200 140 85 Note) Maximum piston speed (mm/s) Cylinder model C 11 11 8.5 8.5 11.5 11.5 7.5 7.5 13.5 10 13 14 D 115 135 115 135 145 165 145 165 185 245 185 250 Mounting bolt size M5 x 115 L M5 x 135 L M5 x 115 L M5 x 135 L M5

Vacuum System Peripherals:

PSE531-M5 Pressure Sensor: Series PSE530 Model 0 to 101 kPa Rated pressure range 500 kPa Proof pressure Air, Non corrosive gas Applicable fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage 15 mA or less Current consumption Analog output (1 to 5 V, Output impedance: Approx. 1 k) Output specifications For details, refer to Best Pneumatics Vol. 16. 13-14-11 11 Vacuum System Peripherals

SMC Pneumatic Clean Series

10 10 10 10 94 83 77 75 30 26 22 20 11 9 9 7 32 24 22 18 26 21 18 15 37 1/8 55 135 33 1/8 45 117 29 1/8<M5 x 0.8> 44 111 27 1/8<M5 x 0.8> 38 104 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 5.5, 9.5 counterbore depth 6 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 18 18 58 64.5 19 17 155 12 12 27 20 45 11 2 7 114 108 62 39 33 12 12 63 Up to 300 35 32 32

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 (EA)5 1 (P) 3(EB) M5: M5 x 0.8 3 position closed center 2(B) (A)4 Back pressure check valve 3 J: With switch A 4 Nil None (EA)5 1 (P) 3(EB) K Built-in 2 B 3 position exhaust center The built-in back pressure check valve type has an effective area approximately 20% smaller.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

MRHQ

0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4 (one each on three sides) 0 -0.062 47h9 M5 x

Series KG Stainless Steel One-touch Fittings

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 M5 0.8 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5 64 87.5 98 75 100 110.5 86 112.5 123 97 125 135.5 108 125 135.5 119 137.5

CNG

7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

CLQ

11 Series CLQ Construction: 20 to 32 i o !

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions