CL

With Air Cushion/Basic: CLG1BA Bore (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 to 200 to 300 to 300 to 300 15.5 19.5 19.5 27 18 22 22 30 13 17 17 19 57.5 69 69 76 8 10 12 16 M4 X 0.7 depth 7 M5 X 0.8 depth 5 M5 X 0.8 depth 8 M6 X 1 depth 12 5 5.5 5.5 6 10 14 24 29 35.5 44 12 14 18 25 14 16.5 20 26 38 45 45 52 M8 X 1.25 M10 X 1.25 M10 X 1.25

Combination Cylinder

19 20 21 23 54 62 62 67 3.5 4 4 4 12 14 18 8 M5 depth7.5 10 12 16 M5 depth8 25 10 14 M6 depth12 Without rod boot With rod boot Bore (mm) H1 NA P PG PH PL PW S TA TB TC H ZZ e f h l ZZ Stroke range 20 25 32 40 to 200 to 300 to 300 to 300 5 6 6 8 24 29 35.5 44 Rc(PT)1 / 8 Rc(PT)1 / 8 Rc(PT)1 / 8 Rc(PT)1 / 8 33 38 39 44 19.5 24 24 24 11 11 10 10 M5 M6 X 0.75 M8 M10 X 1.25 35 40 40 50 11 11

LX

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

JIS Standard Hydraulic Cylinder

21 11 35 14 37 104 88 M10 x 1.25 13 11 3/8 39 136 57 14 29 40 0.15 0.18 25 to 800 118 65 45 10 11 21 37.5 14 36 104 M10 x 1.25 95 13 11 3/8 42 136 57 29 14 50 25 to 800 145 76 52 10 27 14 45 17 43 116 115 M10 x 1.25 18 11 1/2 46 150 60 18 35 63 25 to 800 165 90 63 10 27 18 50 19 132 43 114 M12 x 1.5 20 14 1/2 52 156 71 19 41 0.20 80 25 to 1000 190 110 80 11 22 18 60 24 44 124 155 M16 x 1.5

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85) 77 (85) 79 (87) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 20 20 20 13 14 14 20 20 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S CD LH LT LW LX X Y Z SS e f Q 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 12 15 25 to 1400 50 M10 x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45

AS-FG/ASD-FG

Min. d T H D1 D2 D3 L1 L2 L3 Model 4 17.5 29.4 9.3 ASD230FG-M5-04 12.9 9.6 10 28.3 25.5 28.6 25.8 8 M5 x 0.8 11.7 25 7.8 22.2 6 20.6 32.5 11.6 ASD230FG-M5-06 13.7 39.6 34.6 6 14 22.9 38.5 11.6 ASD330FG-01-06S 13.7 14.2 11.8 36.1 31.1 12 R(PT) 1/8 32.1 10.6 27.1 38.9 33.9 8 15.8 28.2 44.8 15.2 ASD330FG-01-08S 18.5 6 25.2 43.5 12.8 17 ASD430FG-02-06S 18 18.5 15 41.7 36.7 40.4 35.4 8 17 R(PT

ARJ1020F

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 3 Miniature Regulator Series ARJ210 Lightweight body

Electric Actuator Triple Axis P&P Unit

Picture from above B: Recommended Bolt type M6 x 20 M5 x 18 M5 x 18 M4 x 16 M5 x 14 M4 x 14 Recommended tightening torque (N.m) 6.80.3 4.40.1 4.40.1 2.10.1 4.40.1 2.10.1 Motor Coupling Y Z Y Z A The motor mounting bolts must be procured by the customer. Please follow any other mounting standards if the customer provides any. ABCD GHJK LM NP 5.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

VDW

4 11 34 15.5 30.5 33 16.5 19.5 20 4, 6 14 17 35 Port size M5/M6 Grommet Y W 2 x 3.4 Mounting hole U X U1 X1 D Q F 300 Full wave rectifier (AC type) R E C (mm) Model Port size P B B1 E C D F 20 VDW1 VDW2 M5(M6) 20 10 46 15 9.5 11 2 x P Port size B1 M5(M6) 22 11 51 9.5 13.5 B Mounting bracket dimensions Electrical entry Model Port size P Grommet U U1 X1 Y W X Q R 39 VDW1 VDW2 28 14 17 17 M5

Rotary Table/

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

VQ5000

Approx. 216 with AMC610-10 installed (approx. 261.5 with AMC810-14 installed) D side entry (LD) Approx. 100 with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with

LEC-OM02904

LE--LE-CSM-AWG14 14 .

Vacuum Pad

Dimensions: With Buffer ZP3P-T20PTSFJM-B5 ZP3P-T20PTSFKM-B5 Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 5 1.6 5 Width across flats 14 Width across flats 14 3 3 3 3 17 21 A D B 17 21 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across flats 14 20 2.5 20 2.5 1.6 Dimensions Dimensions Part no.

Microspeed Cylinder

Vacuum port, relief port +1.0 0 +1.0 0 mm M5 x 0.8 (10-32 nominal) M5 x 0.8 (10-32 nominal) Bore size (mm) 11(Vacuum type) 12 16 20 25 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.03MPa (43psi) 0.025MPa (3.6psi) Without auto switch: 10 to 70C (14 to 158F) With auto switch: 10 to 60C (14 to 140F) Ambient and fluid temperature

Low Friction Cylinders Series MQ

G 1/4 71 71 86 14 8 10 7 14 12 50 6.6 11 Note) ( ): Rod end dimensions With rod end male thread: MQQ-DM Rod end nut H1 H1 (mm) Bore size (mm) L1 C1 H1 X 10 23.5 10.5 15.5 M5 x 0.8 16 26.5 11.5 16.5 M6 x 1.0 C1 20 28.5 13.5 18.5 M8 x 1.25 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 1180 for details regarding