SQ1000/2000

Uni-wire H System compatible 16 1 to 8 stations 16 stations SUNX Corporation: S-LINK System (16 outputs) compatible SUNX Corporation: S-LINK System (8 outputs) compatible 8 1 to 4 stations 8 stations D side Device Net, OMRON Corporation: CompoBus/D compatible 16 1 to 8 stations 16 stations OMRON Corporation: CompoBus/S (16 outputs) compatible OMRON Corporation: CompoBus/S (8 outputs) compatible

Series IDG

Note 4) Refer to "Best Pneumatics No. 4" page 1.5-16 for regulator flow rate characteristics and pressure characteristics. Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

KP/KPQ/KPG

Union Tee: KPT 3-Applicable tubing D Effective area mm2 Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS D D KPT04-00 10.4 4.5 18 4 4 7 20.7 4 KPT06-00 12.8 5.3 19.5 10 10 9 22.8 6 KPT08-00 15.2 6 21.5 26 18 16 26.3 8 4.2 8 KPT10-00 18.5 6.8 24 41 29 25 29.4 10 M M KPT12-00 20.9 7.5 25 58 46 29 31.4 12 L L Note 1) D indicates the maximum diameter.

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

Mechanically Jointed Rodless Cylinders

12.2 47.5 Rc, NPT, G1/8 7 6 211 33 39 14 10 31 13.5 79 52 92 77 44 225 16 15 64 Rc, NPT, G1/8 8.5 7.5 259 40 46 15 14 37 14 94 66 112 92 60 276 19.5 16.5 80 Rc, NPT, G1/4 8.5 8.5 293 44 58 25 15 47.5 21 116 74 142 114 66 310 20.5 20 95 Rc, NPT, G3/8 10 10 336 64 70 29 16 58 20 139 99 162 136 84 356 23.5 27.5 110 Rc, NPT, G3/8 21 Series MY3A/3B Standard Type: 16, 20, 25, 32, 40, 50, 63 Stroke

CL

20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 Without rod boot With rod boot Bore size (mm) P J K KA L MM N RR S U W H Z ZZ e f h Z ZZ l 36 45 45 60 60 75 75 75 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke

Rotary Table/

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77 35H9

Electric Actuator

Note 7) Up to 16 axes can be set.

One-touch Fittings Series KQ2

Weight (g) M L1 A L2 P Q D 1 8 5 32 3 16 1 4 5 16 1 8 5 32 3 16 1 4 5 16 KQ2U01-99 KQ2U03-99 KQ2U05-99 KQ2U07-99 KQ2U09-99 10 12 17 19 22 2 2.5 3.5 4.6 6 15.5 16 16.5 17 18.5 35 35.5 39.5 39.5 46 9.6 10.4 11.4 13.2 15.2 9 9.7 10.6 12 13.7 9.6 10.4 11.4 13.2 15.2 50 51.5 56 56.5 64.5 17.5 18 20.5 21.5 24.5 KQ2U Metric e v i t c e f f E m m ( e c i f i r o 2) . t W ) g ( e l b a c i l p p A

Table of Contents

VS4 16 stations Max. 16 stations.

Electric Grippers

Compact 20 10 10 4 3 to 6 16 to 40 11 to 28 6 to 14 25 16 14 6 4 to 8 32 20 22 52 to 130 10 16 to 40 11 to 28 40 25 30 84 to 210 14 F Type (2 fingers) S Type (3 fingers) Can hold various types of workpieces with a long stroke.

Fieldbus system EtherNet/IP compatible SI Unit

Content (IO size at each port) IO-Link master size setting No Process data size at each communication port Port 1 Port 2 Port 3 Port 4 44 byte 70 byte 134 byte 1 2/2/2/2 byte 2 2 2 2 2 4/4/4/4 byte 4 4 4 4 Can be selected 3 8/8/8/8 byte 8 8 8 8 4 16/16/2/2 byte 16 16 2 2 Can be selected 5 32/2/2/2 byte 32 2 2 2 Can be selected 6 16/16/8/8 byte 16 16 8 8 7 16/16/16/16 byte 16 16 16 16 8 24

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

V

T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3 1.8 25 ZPR16 U C 16 18 12.5 21.5 30.4 46.5 20 67.5 72 3.5 1.2 25 D E E P T Y P E I: M6X1 I: M5X0.8 Model A B C D E F Y G H H G ZPR10D 10 12 15 24 32.9 49 20 70 75 6 25 ZPR16D 16 18 16 25 33.9 50 20 71 76 7 25

Table of Contents

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.

Modular/F.R.L. Units Series AC

Specifications AA IN, OUT Effective area (mm2) ( ): Cv factor INOUT 10 (0.54) 14 (0.76) 16 (0.87) 31 (1.68) 27 (1.46) 38 (2.06) 55 (2.98) 77 (1.73) 82 (4.44) 125 (6.78) Port size Model OUTEXH 11 (0.60) 16 (0.87) 14 (0.76) 29 (1.57) 36 (1.95) 40 (2.17) 42 (2.28) 49 (2.66) 50 (2.71) 53 (2.87) EXH 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 3/4 1 1/8 VHS20 SUP VHS30 1/4 B OUT IN VHS40 3/8 C VHS40-06 1/2

VQZ1000/2000/3000

VQ2000FPG-FB 01 1 station 0.8 to 1.0 Nm 16 16 stations VVQ2000-FPG-066 stations manifold VQ2000-FPG-C6C6-D: 3 sets VQ2000-FPG-C8C8-D: 3 sets Double check block Note) It is the tightening torque for mounting a bracket for the perfect block.