OMR0031

Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.

Nozzle Type Ionizer

Nozzle Type Ionizer Lightweight 16 mm x 100 mm x 46 mm RoHS Thickness Width Height Slim 33% reduction 120 g a 80 g 16 mm Offset voltage: 10 V (For energy saving static neutralization nozzle) 46 mm 100 mm Female threads for piping High flow rate nozzle Energy saving static neutralization nozzle Nozzle Variations Made to order Application Examples With right angles -X367 Dust removal and static

AC Servo Motor Driver (Pulse input type)

Parameter list for each mode . 15 4.1 Parameters common to each mode . 16 4.2 Position control mode . 16 4.3 Speed control mode . 16 4.4 Torque control mode . 17 5.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68 31.5 43 21.5 75-01-A18 75-01-A18 143

VHK

26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2 16 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 26.2 18.7 9.7 VHS 22 10 8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

VHK

16 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-08F 26.2 18.7 9.7 VHKl-10F-08F 22 10 8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-10F 30.5 20.8 16.1 VHKl-12F-10F 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-12F-12F 31.5 21.8 17.5 3 port valve 1(P): Male thread, 2(A): One-touch fitting

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

196 20 21 62 89 153 46 149 42 50 50 144.5 156 199 25 29.5 41 84 131 152 172 199 20 16 37 57 84 63 63 Note) Intermediate strokes other than standard strokes are produced by installing spacers. 5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2

Table of Contents

Maximum stations are 16.

Rotary Actuator

Combination between -Xl and -XAl Symbol Description Applicable shaft type Applicable size Combination X Z T J K -XA33 to 38, 40 to 46, 51 to 59 -X6 Stainless steel shaft/bolt, etc.

High Vacuum Angle Valve

type * Size 16 is not applicable to H4, H5.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

Series KG Stainless Steel One-touch Fittings

A M Weight (g) L D Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

LEY-OM007

3 26 NBR 4 27 5 28 6 29 7 30 8 POM 31 9 32 10 33 11 34 12 35 13 36 14 37 15 38 16 39 17 40 18 101 41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Series CE1

41.5 48 56 80 83 86.5 D-F7lWV 5 14 18 40 45 42.5 39.5 46 54 78 81 40.5 D-A9ll 3 12 16 38 43 81.5 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5 22.5 44.5 49.5 47 43.5 50 58 82 85 88.5 D-F9ll 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 D-F9lWl 6 15 19 41 46 43.5 4.4-16

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

, 90+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 15+55 1.26 (1.30) 1.81 (1.86) 2.79 (2.84) 4.93 (5.08) 6.79 (6.99) n=2, 4, 6, 8, Flange 2 (Dif. / same side(s)) Standard weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16,

reduces flow setting time

13.2 30.1 21.5 40 14.2 16 AS231FS1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FS1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FS1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FS1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FS1-02-09 (S) 5/16 13.2 37.1 23.5 59.9 14.2 50 AS331FS1