Smooth Cylinder

(mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 8 13 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 7.5 Up to 300 16.5 10 17 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Electric Rotary Table

4.5 22 13.5 4H8 ( ) depth 5 +0.018 0 2 x M8 x 1.25 x 16 25 2 +0.018 0 4H8 ( ) depth 5 127 LER30-2 (Rotation angle: 180) LER30-3 (Rotation angle: 90) 5.5 2 x M6 x 1.0 (Adjuster bolt) 14.5 6 x M5 x 0.8 x 8 5.2 23 2 49 126 (at max. adjuster bolt length) 30 19.5 66 46 123.2 (Arm operating range) 48 Note) Not applicable to 180 specification (LER30-2) 75 2 x 11 depth of counterbore 6.5 depth

45

Triangle mark position Stations n 11 stations 12 13 14 15 16 17 18 19 20 stations 310.5 323 235.5 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 300 312.5 225 237.5 237.5 250 262.5 27.5 287.5 300 286.5 297 202.5 213 223.5 234 244.5 255 265.5 276 12 13 16.5 17.5 12 13 14 15 16 17 1-6-96 Base Mounted Series SX3000/5000 SS5X3-45PDStations U(26 pins) C4 C6 (Pitch

45

17.5 15.5 14 12 16.5 15 13 12 13 14 15 16 stations Stations n 11 stations 335.5 DIN rail 348 360.5 373 398 410.5 L1 L2 L3 L4 325 337.5 350 362.5 387.5 400 262 278 294 310 326 342 Manual override (Press and turn for the locking type.)

48

4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

Compact

Right) MXZ25L(Pilot port location: Left) 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) 22.2 + Stroke 22.2 + Stroke 9.5 2.5 9.5 (54.9) (54.9) 8 8 2.5 Auto switch Auto switch 10 MXZ Series Model Selection For Transfer (1) Load weight and overhang L1 and L2, should be within the average speed limit in the graphs. (2) For horizontal use, overhang L3 should not exceed the allowable range

Booster Regulator/Air Tank

Booster Regulator/Series VBA Air Tank/Series VBAT Series VBA/VBAT CAT.ES11-96D Booster Regulator Series VBA Reduced by Reduced by 13 13 dB dB (A) compared with the conventional model compared with the conventional model compared with the conventional model Reduced by 13 dB (A) Improved service life that of the conventional model that of the conventional model Doubled Doubled that of the conventional

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

180° Angular Style Air Gripper Series MHY2/MHW2

2 x M6 x 1 thread depth 12 22.5 (Mounting hole) (Mounting thread) (Limted area for mounting attachment) 46 58 45 45 42 26H9 + 0.052 depth1.5 0 30 Positioning pin hole 60 18 5 86 30 107 Auto Switch Mounting Groove Dimensions M5 x 0.8 (Finger opening port) 14 24 M5 x 0.8 (Finger closing port) 42 8 3 4 3 MHY2-25D2 Opening/Closing direction through-hole type 4 x 5.5 through (Hole for mounting

Vacuum gripper

-7A-X2 25 27 16 28 29.5 34 ZPG32B-7A-X2 32 34 18.9 37 34.5 39 14 13 15 10.5 -37No.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA

G15/G27

G27 21 (Width across flats) How to Order G 10 01 15 Option Connection thread Symbol Specifications Size R 1/8: M5 (Female thread) R 1/16 Pressure gauge 01 (1) Symbol Nil X30 Both MPa and psi R1 (2) Size X201 M5 (Female thread) only Note 1) Both R1/8 and M5 (female thread) in case of G15 type Note 2) Compatible with G27 type only Note 1) X3 (Wetted parts SUS) specifications are not available

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Tightening torque: 0.18 to 0.25Nm 1.13-5 Series VQD1000 Dimensions L plug connector: VQD1121l-lL-M5 M plug connector: VQD1121l-lM-M5 Lead wire length: 300mm 2-M5 X 0.8 (A, B port) Direct manual override Light 0.5 0.5 4 11 2 (11) 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 Mounting hole 28.5 49 50.5 2-M5 X 0.7 (P, R port) 3 1 (R) (P) 7.4 3 (13) 1.13-6 Series VQD1000 Dimenisons

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

AIR COMBINATION

Example AC10-M5CG-T-12NR-A AC 10 M5 1N A 1N 1 2 3 Symbol Description Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied.

Compressed Air Cleaning Filter Series

Refer to Flow Characteristics (page 13) and Maximum Air Flow below. Modular connection is possible with AFF2C to 22C. (For details, refer to page 61.)

Lubrication Equipment

13 13 13 13 90 90 90 90 90 210 210 210 210 210 106 106 106 106 106 AL3000-l02 to 03-1 AL4000-l02 to 04-1 AL4000-l06-1 AL5000-l06 to 10-1 AL6000-l10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual lubrication Large flow style Model AL800 AL900 AC 4 1 1 Port size 2 1 1 2 AV Fluid Proof pressure Max

CC

2 32 120 5 33 82.5 CC100-lSl1-lG CC100-lll1-lG 286 386 511 611 836 736 s s s CC100-lLl1-lG 7 13 2 32 120 5 33 92 CC160-lLl1-lG 399 524 624 949 849 749 1049 s s CC160-lLl1-lG 7 20 2.5 46 185 0 29 120 * Hexagon socket head cap screw is used for mounting hole.