PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

VZ100/300/500

) Dimensions VZ300: 8 mm longer in total length VZ500: 8 mm longer in total length Dimensions: VZ312R-G-M5-X20 Manual override (Non-locking) (External pilot port) PE port M5 x 0.8 4-6-46

SMC Pneumatic Clean Series

(mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175 173 163 ZZ M6 x 1 depth 12 M5 x 0.8 depth 8 M5 x 0.8 depth 7.5 M4 x 0.7 depth 7 J 27 19.5 19.5 15.5 AL Bore size A M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 44 35.5 29 24 NA 1/8 1/8 1/8<M5 x 0.8> 1/8<M5 x 0.8> P 9 7 7 7 RA 87 95 93 93 S 6 5.5 5.5

Mechanically Jointed Rodless Cylinders

(mm) Fitting type Fitting model Cylinder model size Connection thread Cylinder model size Connection thread Male connector Male elbow Male connector Male connector Male elbow 4 KJH23-M5 KJL23-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KJL04-M5 KQ2L04-M5 KQ2S04-M5 KQ2L06-M5 KJS23-M5 KQ2H23-M5 KQ2L23-M5 KQ2H04-M5 KQ2L04-M5 KQ2S04-M5 KQ2H06-M5 KQ2L06-M5 KQ2S06-M5 KQ2H23-01S KQ2L23-01S KJH04-01S KJS04-01S

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

Floating Joint

M301.5 18 53.1 DA00163 DA00225 DA00164 DA00204 DA00165 DA00205 46 50 55 60 65 75 M302 M332 M361.5 M391.5 M423 M481.5 18 20 21 23 25 29 53.1 57.7 63.5 69.3 75 86.5 DA00151 24 M161.5 10 27.7 DA00150 DA00153 24 27 M162 M181.5 10 11 27.7 31.2 Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !5 r t y !2 !3 !0 q u !

Slider Type/Ball Bushing Bearing

54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5

Pressure Gauge Guide

G E M 10 01 C 46 Attachment (Cover ring assembly) 5 Symbol Specifications Connection thread Size M5 x 0.8 x 5 Pressure gauge Without cover ring assembly Nil Size Symbol Clear cover has no protrusion. (Clear cover is irremovable.) Outside diameter C Symbol 46 42.5 01 R 1 8 02 R 1 4 Clear cover has protrusion. (Clear cover is removable.)

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

17

MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 42 46 53 53.5 G1/8 G1/8 29 33 37 37.5 6 8 10 10 7 7 8 9 6 6 8 7 26 30 36 42 10 10.5 11.5 11.5 7 7.5 9 10 58 64 83 93 12 16 20 25 M4 M4 M5 M5 13 15 18 21 13 15 18 21 18 22 24 30 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 10 12 13 15 M4 x 0.7 M5 x 0.8 M5 x 0.8

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

VCL

8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 332 Direct Operated 2 Port Solenoid Valve For Steam Series VCS Series

Electric Grippers

LEHZ40 LEHF10 LEHF20 LEHF32 LEHF40 M3 x 0.5 M4 x 0.7 0.9 1.4 M3 x 0.5 M5 x 0.8 0.9 3.0 M4 x 0.7 M6 x 1 1.4 5.0 M5 x 0.8 M6 x 1 3.0 5.0 M5 x 0.8 3.0 M6 x 1 5.0 When using the thread on the back of the body When using the thread on the back of the body Max. screw-in depth L [mm] Max. tightening torque [Nm] 10 Max. tightening torque [Nm] 6 Max. screw-in depth L [mm] Model Model Bolt Bolt LEHZ

Clamp Cylinder with Lock

50 64 64 20 55 78.5 58 17 58 M16 x 1.5 M4 x 7 87.5 52.5 5.5 14 118.5 230.5 51 63 74 74 20 69 82 72 17 58 M16 x 1.5 M5 x 7 91 53.5 5.5 19 122 234 57.5 Note) Refer to page 14 and 15 for Accessories.

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

3 Port Air Operated Valve Series SYJA300

x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12