Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

Model Selection 1

25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

33.8 21.4 43.9 13.3 19 AS23l1F-U02-09A 5/16" 13.2 34.9 23.5 46 14.2 AS23l1F-U02-11A 3/8" 15.9 20.9 38.1 24.7 47.3 15.6 20 AS33l1F-U02-07A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 43.6 42 13.3 31 AS33l1F-U02-09A 5/16" 13.2 37.1 23.5 59.9 14.2 AS33l1F-U02-11A 3/8" 15.9 17.4 23 41.2 26.1 62.5 15.6 32 AS33l1F-U03-07A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 35.9 34.3

JXCx-OMT0061CN

CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

High Power Cylinder Series RHC

14.5 18 200 to 700 20 19.5 8 6 28 7 5.5 25.5 39 31 48 49.5 56.5 16 18 22 12 200 to 700 25 19.5 9 6 30 7 5.5 28.5 36 38 51 51.5 55 19 18 22 12 200 to 1000 32 21 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 20.5 24 16 200 to 1000 40 MM LZ LY LX LT S NN ND NF NE P NB ZZ LS NA Y N WH X Bore size (mm) 55 41 40 5.5 M22 x 1.5 15.0 13 33.5 30 265 26 9 22 20 232 M8 x 1.25 192 1/4 20 55 46.5 40 5.5 M24

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

VQ5000

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

Vacuum Unit

/ Complex exhaust) 40 40 100 Vacuum pressure [kPa] 30 30 80 Air consumption 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] Suction flow [L/min (ANR)] 19 Vacuum Unit ZK2mA Series The flow rate characteristics correspond to the standard supply pressure.

VQC

20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

20 20 20 23 23 23 23 27 Refer to the page 68 for dimensions with connector cable. 19 Series SYJ500 Base Mounted (With Sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

18 ( ) ( + ) Gray None 5 stations 10 23 11 SOL.A 6 ( ) ( + ) Pink None 24 12 SOL.B 19 ( ) ( + ) Orange Black 6 stations 25 Stations are counted starting from the first station on the D side. 13 SOL.A 7 ( ) ( + ) Blue None SOL.B 20 ( ) ( + ) Red White 7 stations SOL.A 8 ( ) ( + ) Purple White SOL.B 21 ( ) ( + ) Brown White 8 stations SOL.A 9 ( ) ( + ) Gray Black Connector terminal

AC Servo Motor Driver (Pulse input type)

Parameter Configuration using Setup software (MR Configurator2TM)17 5.1 Setup software (MR Configurator2TM) . 17 5.1.1 Installation Method .17 5.2 Basic driver set-up for Initial Test Drive . 17 5.2.1 Start up the Setup software (MR Configurator2TM) .18 5.2.2 System Settings .19 5.2.3 Model Selection .19 5.2.4 Driver ON LINE Check .20 5.2.5 Help Function .20 5.3 Parameter setting (Driver

KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

Table of Contents

Note 1) Note 2) 2-4-19 20 S VQ1000 Kit (Serial transmission unit) The serial transmission system reduces wiring work, while minimizing wiring and saving space.

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75