Slider Type Ball Screw Drive/11-LEFS Series

6 900 11-LEFS40ll-850l 1264.5 1294.5 856 1028 14 6 900 11-LEFS40ll-900l 1314.5 1344.5 906 1078 14 6 900 11-LEFS40ll-950l 1364.5 1394.5 956 1128 16 7 1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc. P tight screw (4 x 14), 2 pcs. (3)Intermediate support bracket EX600-ZMB1: For direct mounting Enclosed parts: Round head screw (M4 x 5), 2 pcs.

DOC1003626

power supply 13 Contact input signal 1 detection 14 Contact input signal 2 detection 15 None HRS400-A-46 3.13 Register map 3-21 DOC1003626 Chapter 3 Serial communication 0 None 1 Communication error 2 Outside of the ambient temperature range 3 Maintenance alarm 4 Refrigeration circuit failure 5 Sensor failure Alarm flag 3 6 Controller failure Alarm given off status 0= Not occurred 1= Occurred

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA x M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N x M5 x 0.8 thread depth 10 (Insert) 6 x M5 x 0.8 thread

Stroke Reading Cylinder and Counter

4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 x 1.5 21 7 18 T P L M N O Q X Z Bore size (mm) 32 40 50 63 1 8 Rc 41 34 5.5 M6 x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6

MXW Series Long Stroke Slide Table

10 16 19 8 7 9 20 12 13 11 14 Parts List Note Material No.

CRQ2

34 69 (11) 68 14 39 14.5 16.5 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 16 16 5.2 49 78 (13) 76 16 47 18.5 55 40.4 Size K Q S W Keyway dimensions TF (H9) TG (H9) TL Rotating angle JJ US TA TD UW G L TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 20 11.5 4 1 13.5 27 4 4 2.5 15 59 24.5 74 8 11 9.6 M5 x 0.8 depth 6 0 0.03 30 4 33 4 20 13.5 2 19 36 4 4 2.5 18 83 65 27 10 13

25

48 14 100 2 AAA batteries to be set 17 Transition wiring cable/IZS41-CF 17.5 17.5 16.4 6.2 B A 1 5 BA 5 1 L (mm) IZF41-CF02 IZF41-CF05 IZF41-CF08 16.4 Part no. 2000 5000 8000 47 L 47 434 IZS40/41/42 Series Specific Product Precautions 1 Be sure to read this before handling the products.

MX-OMP0051

2-9 3mm 3mm 2-10 5~6mm 0.05~0.15Nm 90 ( ) 15 D-M9M9W A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(

Compact Guide Cylinder

16.5 26 28.5 7.5 10 12.5 30 32.5 32 12 13 15.5 25 27.5 8 9 11.5 29 31.5 40 15 20 20 32 32 11 16 16 36 36 50 14.5 21 21 33 33 10.5 17 17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

Auto Switch Guide

Auto Switch Internal Circuit D-C73C Contact protection box CD-P12 Brown Choke coil LED OUT () Brown Weight Resistor Zener diode Reed switch Zener diode (g) OUT ( ) Blue D-C73C D-C80C Auto switch model Blue 14 14 0.5 Lead wire length (m) 53 53 3 D-C80C 83 83 5 Contact protection box Dimensions OUT () Brown Reed switch CD-P11 CD-P12 Lead wire with connector OUT ( ) Blue Indicator light D-C80C

Auto Switch Guide

Auto Switch Internal Circuit D-C73C Contact protection box CD-P12 Brown Choke coil LED OUT () Brown Weight Resistor Zener diode Reed switch Zener diode (g) OUT ( ) Blue D-C73C D-C80C Auto switch model Blue 14 14 0.5 Lead wire length (m) 53 53 3 D-C80C 83 83 5 Contact protection box Dimensions OUT () Brown Reed switch CD-P11 CD-P12 Lead wire with connector OUT ( ) Blue Indicator light D-C80C

Auto Switch Guide

Auto Switch Internal Circuit D-C73C Contact protection box CD-P12 Brown Choke coil LED OUT () Brown Weight Resistor Zener diode Reed switch Zener diode (g) OUT ( ) Blue D-C73C D-C80C Auto switch model Blue 14 14 0.5 Lead wire length (m) 53 53 3 D-C80C 83 83 5 Contact protection box Dimensions OUT () Brown Reed switch CD-P11 CD-P12 Lead wire with connector OUT ( ) Blue Indicator light D-C80C

MIW/MIS

Note 2) Refer to page 14 for lead wire length.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

30.6 AS3002FS-12 12 20.9 18.5 76 10.9 22.8 56.8 55.4 22.1 22 34.2 AS4002FS-10 10 18.5 16.5 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7 28 33 14 26.2 21 26 29 10 19 42.5 AS4002FS-12 12 21.7 18.5 81.3 22 47.9 60 9.8 21.7 55.7 54.3 21.8 25 12 20.5 17 4.5 8 16.6 20 24.5 28.5 9.3 19.2 1 Reference dimensions Inch Size Model Applicable tubing O.D. d D1 Release button D2 D3 D4 D5 L1 L2 L3 L41 L5 L6

AIR CYLINDER

Wear ring Resin 1 15 Rod seal NBR 1 16 Cushion seal Urethane 2 17 Piston seal NBR 1 18 Cushion valve seal NBR 2 19 Cylinder tube gasket NBR 2 20 Piston gasket NBR 1 21 Magnet (1) 26 - Figure -5 Mounting bracket: Single clevis (C) Table -14 Parts list (The item with * mark is different from the basic type 25A-C (D) S2.

Electric Slide Table / High Precision Type 《 AC servo motor 》

LESYH series electric slide table / Common precautions . 21 3.1 Design / selection. 21 3.2 Handling . 21 3.3 Precaution on maintenance . 23 4. Troubleshooting . 24 -1- LESYH Series / Electric Slide table Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63