SX

12 stations Note) For SS5X3: 4 to 12 stations.

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE B X 2 E X G Seal Y200T Y400T J F A H K Spacer width D Model A B BB C D E EE F G G H J K Applicable model Y100T 6 56 24.5 40.5 20 27 6.8 4.5 4.5 14 2.8 25 AC10 Y200T 3 67 29 53 24 33 12 5.5 5.5 19 3.2 30 AC20 Y300T 4 82 41 68 35 14 7 7 21 4 41 AC25, AC30 Y400T 5 96 48 81.5 40

MQQ

RR CL + Stroke RR 15 6.5 12 8 6 10 A + Stroke 18 8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 24 VDC 10% 12 to 24 VDC PF2M7 PFMC 10% 18 to 30 VDC 10% PF3A7 H-L 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 21.6 to 30 VDC PF3A701H/ 702H-L 18 to 30 VDC 10% 18 to 30 VDC PF2M7-L PFMC-L 10% 21.6 to 30 VDC PF3A8 H-L Temperature characteristics (25C standard) 3% F.S. 1 digit (15 to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 V Grommet (NPN equivalent) Yes Yes 100 V 12 V 24 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 12 V 2-wire Grommet 24 V IC circuit 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Solid state switches marked with are produced upon receipt of order.

HRX-OM-X071

5.4.1 Screen configuration . 5-12 5.4.2 Main menu . 5-12 5.4.3 Alarm display menu . 5-14 5.4.4 Notice for maintenance Menu . 5-15 5.5 Advanced setting mode . 5-17 5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6

CXS

B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing

CLS

For details, refer to page 9-9-21.

Series AS-FM/AS-M/ASD-FM

13 14 15 16 17 18 19 20 21 Note No.

MVGQ

VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 12 6 N x M5 x 0.8 thread depth 6 (Insert) 6 4 x M5 x 0.8 thread depth 7 1 (With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 62 48 5H9 ( ) depth 4 +0.030 0 F 20 18

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

MGQ

(mm) 40 13 21 22 37 38 78 53 77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL Bearing type 10 21 27 34 38 20 18 22 28 30 51 55 70 71 25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275

MK

3 I = m a2 12 I = m2 2r 2 5 4.1-21

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

HRX-OM-X037

Refer to Table 5.4-12 Offset setting for details. (1) (2) Offset setting Table 5.4-12 Offset setting No. Indication Item Explanation Setting range (1) Offset Temp.

Shock Absorbers and Rate Controls

.63 Pnol z5tt 5.t2 (lf)IYs.lzU t .38 Ll3 1.20 3.41 l{/a N/A .21 1.25 PR0220tt 8. t4 8.34 {lt} I /4-12 UNt .38 Ll3 1.20 5.03 N/A N/A .21 Ll2 .63 PR0225tt 8 . l 4 8.34 (lf)IYs,l?U f .38 Ll3 r.20 5.03 N/A N/A .21 1.25 .DJ Notes: 1.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,