CLS

20 25 25 30 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 145 136 115 90 90 90 115 115 140 16 58 110 M14 x 1.5 110 190 100 230 Up to 1400 1401 to 1600 3 5 30 46 114 161 78 18 160 110 146 128 212 16 64 110 M14 x 1.5 112 255 Up to 1400 1401 to 1600 130 182 95 23 180 169 144 18.5 74 120 M16 x 1.5 132 236 118 275 Up to 1400 1401 to 1600 5 5.5 6 30 34 42 16 21 35 149

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M 2-Applicable tubing TPH TPS 37.4 18 4 4 4 10.4 KPH04-00 4 L L2 L1 D D 39.6 19.5 10 10 6 12.8 KPH06-00 6 M M L 44.4 21.5 26 18 10 15.2 KPH08-00 8 48.6 24 41 29 15 18.5 KPH10-00 10 50.6 25 58 46 18 20.9 KPH12-00 12 Note 1) D indicates the maximum diameter.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

CLK1

11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Fieldbus System

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

CQS

25 17 17 19.5 22.5 40.5 41.5 51 57.5 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 RR CZ CX CW CU CT CD 6 6 9 10 10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

Vacuum Unit

stations Release valve 9 10 5 stations Release valve 18 Supply valve Supply valve 6 11 12 6 stations Release valve 6 stations 19 Release valve 7 Supply valve 13 14 Supply valve 20 7 stations Release valve 7 stations Release valve 8 15 16 Supply valve Supply valve 21 8 stations Release valve 9 8 stations Release valve 17 18 22 Supply valve Supply valve 10 19 20 9 stations Release valve 9 stations

Clamp Cylinder with Lock Series CLK1

3 x 38l 17 30 30 17 20 20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Modular F.R.L. Unit

40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

NCA1

52 : 1 3/4-12 85 : M24 x 1.5 25 : 5/8-11 53 : 1 3/4-5 86 : M26 x 1.5 26 : 5/8-18 54 :1 7/8-12 87 : M30 x 1.5 FEMALE ROD DIAMETER BORE (INCH) A B C MM KK WF 150 (1.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 200 (2) 3/4 1 1/8 3/8 5/8 7/16-20 1 250 (2.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 325 (3.25) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 400 (4) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 22 Air Cylinder Extended Series NCA1 PARTS

Air Cylinder NCA1 Series

52 : 1 3/4-12 85 : M24 x 1.5 25 : 5/8-11 53 : 1 3/4-5 86 : M26 x 1.5 26 : 5/8-18 54 :1 7/8-12 87 : M30 x 1.5 FEMALE ROD DIAMETER BORE (INCH) A B C MM KK WF 150 (1.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 200 (2) 3/4 1 1/8 3/8 5/8 7/16-20 1 250 (2.5) 3/4 1 1/8 3/8 5/8 7/16-20 1 325 (3.25) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 400 (4) 1 1/8 1 1/2 1/2 1 3/4-20 1 3/8 22 Air Cylinder Extended Series NCA1 PARTS

HRX-OM-X037

9.4.14 HRL100-W-40-T2 CH1 . 9-18 HRL Series HRX-OM-X037 Contents 9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions

MB

20 30 35 40 45 45 55 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 22 30 35 35 40 40 up to 500 up to 500 up to 600 up to 600 up to 800 up to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With Mounting Bracket Refer to basic mounting (B) for other dimensions and with rod boot.

Cylinder with Lock Series MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

Electric Actuator Triple Axis P&P Unit

cable are included. 2) Sensors must be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 11 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31

2/3 Port Valve

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.