MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

IIIIIIIIII

PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

Heatless Air Dryer ID Series

Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage Thread type 20 30 40 60 Symbol Description 02 04 06 1 4 1 2 3 4 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) Single phase 220 VAC (50 Hz) 0 F G N NPT 1 5 6 134 Heatless Air Dryer ID

EXxx-OMN0029CN

ON/OFF LED PLC ST(0) () ON/OFF ST / (60 ) -37No.EX-OMN0029CN-D EX600No. H.T. () LED PLC 0 1 5 AXA / () / / H.T. () LED PLC 6 AYA () / / (60 ) -38No.EX-OMN0029CN-D EX600No. H.T. () LED PLC 0 1 7 AMB / () / / / / H.T. (SI ) ON/OFF LED PLC ON/OFF 8 ST(M) () ST(M) SI 9 ST(M) OFF PWR () DC24 V10 10 PWR(V) () DC24 V+10/-5 (60 ) -39No.EX-OMN0029CN-D No.

CHKD/CHKG

(Example) The overall length of the cylinder tube for CHDKDB50-60-XC61, is equivalent to 75 strokes.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60 20 FZ 20 64 20 A + Stroke 4-FD 25 65 22 34 30 72 22 40 40 89 22 50 Rear flange type: MQQTG 10, 16, 20 25, 30, 40 2-FD 4-FD (mm) Bore size (mm) Stroke range (mm) A L M FV FV 10 10 to 40 45 8 L FT B + Stroke FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 25 10 to 50,75,100 62

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cross sectional area 0.23mm2 3.5 to 7 85.5 78 60 M type plug connctor (M) R 3 1 P (Lead wire length) 82.5 94.5 61.5 300 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light R 3 1 P Equation L1=19n+11 L2=19n+23 n: Stations (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

60 Urethane rubber 0 to 60 60 Fluoro rubber 0 to 250 50 EPR 20 to 150 The above table covers only general characteristics of subject rubber materials.

SMC

35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25

KJ

T VMG Union Y P. 60 KCU Use to branch line in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 60 KCJ Use to add the selfseal mechanism to the usual One-touch fittings, Series KQ. Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function.

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

VS 8-2/VS 8-4

Output circuit Surge voltage 24 V 0 V sol.1: Energized 60 V R Internal circuit Surge voltage 0V sol.2: De-energized 60 V R Surge voltage 24 V 0 V Large capacity Load: Energized 60 V R Relay Power supply circuit breaker 24 VDC Figure 1. Surge intrusion circuit example (NPN outlet example) Back page 4 5 Port Solenoid Valves Precautions 3 Be sure to read this before handling.

PA3000/5000/PAX1000

per minute 1 60 = x x Reference life cycles Cycles per minute 1 8 (daily operating time) Service life 1 60 = 1 8 50,000,000 50 x x 2083 days = 27 Process Pump Common Precautions 5 Be sure to read before handling.

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 230/50/60/1 Flow Rate: 43 LPM , 43 LPM, Max Pressure: 2.9 PSIG / 80 in H20 / 200 mbar , 2.9 PSIG / 80 in H20 / 200 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.15

Speed Controller with One-touch Fitting

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator