ARM10/11

If vibration is applied, malfunction or setting errors may result. 14-4-50 33 F.R.L.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Bore size (mm) 0.3 Operating direction 0.5 0.7 181 IN 302 422 32 241 OUT 402 563 Standard Stroke 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 IN 495 825 1150 32 1 50 OUT 589 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,

ARM10/11

If vibration is applied, malfunction or setting errors may result. 14-4-50 33 F.R.L.

VQC

or less 52 or less 3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280 7.0 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber seal VQC4401 6.2 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Metal seal VQC4500 Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less Rubber

tTV2000/3000

0 5 I 0 5 -a o -1 0 50 75 100 5 0 0 1 0 0 0 0 25 50 75 100 Input signal %F S Input signal %F S Relief flow characteristics suppty pressure: o 2MPa Pressure characteristics set pressure:0 05MPa Flow rate characteristics supptv pressure:0 2MPa 1 0 a $ 0 5 s 3 0 0 o o = o 0 0 0 1 0 2 0 Supply pressure lvlPa tlectro-Pneulnatis Series lTv203tr Repeatability Hysteresis Linearity @ 0 5 f, I3 o o

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

KQ2

Principal Parts Material Made to Order Refer to page 75 for details.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Since Series CHM does not have an air release valve, release air from components other than the cylinder (e.g. from piping, etc.). 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) D-B5 D-B6 D-G5NTL 15 + 50 n 2 2 15 75 10 2. When operating a cylinder for the first time, be sure to release the air at low pressure.

NCA1

4.50 2.88 4.10 6.63 2.75 7.63 .75 1.38 5.88 600 (6") 1.375 1-14 1.63 2.000 6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 .88 1.63 6.63 MF2 Head side rectangular flange (G) P + Stroke 4-FB 2-EE KK MM B R E TH WF LF+ Stroke TF ZJ + Stroke UF ZF + Stroke A MM KK A B E EE FB LF+ P+ R TF TH UF WF ZF+ ZJ+ 1.000 3/4-16 1.13 1.500 5.50 1/2 NPT .50 4.50 2.88 4.10 6.63 2.75 7.63 1.38 6.50 5.88 Bore

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 4 position dual 3 port valve 0.1 to 0.7 2 position double 0.2 to 0.7 3 position External pilot operating pressure range (MPa) 100 kPa to 0.7 Operating pressure range 2 position single, double 0.25 to 0.7 3 position Ambient and fluid temperature (C) 10 to 50 (No freezing.

Compact Guide Cylinder

1.65 2.24 2.46 2.87 3.28 3.69 4.10 4.51 50 MGQM50 2.54 3.09 3.65 4.21 4.77 5.33 5.89 6.5 63 MGQM63 3.01 3.63 4.23 4.85 5.47 6.09 6.71 7.3 80 MGQM80 5.66 6.59 7.49 8.41 9.33 10.3 11.2 12.1 100 MGQM100 8.96 10.3 11.6 12.9 14.2 15.6 16.9 18.2 Ball Bushing MGQL12 to 100 (kg) (mm) Model Standard stroke (mm) Bore size 10 20 25 30 40 50 75 100 125 150 175 200 12 MGQL12 0.23 0.26 0.29 0.35 0.38

AC Servo Motor Driver (Pulse input type/Positioning type)

Target position Rotation speed Dwell Auxiliary time constant time constant [10STMm] [r/min] [ms] function [ms] [ms] 1 5.00 3000 100 150 100 1 2 -6.00 2000 100 100 0 3 3 3.00 3000 50 50 0 0 (Note) Note.

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

Dedicated Controller

55 Normal rotation suppression input Reverse rotation suppression input Alarm reset input PG output C phase 0V Servo alarm output 0V Frame ground 65 75 Positioning complete signal output 0V External power supply input Example for driver connection between equipment +10% 15% +10% 15% Single phase 200 to 230V AC (50/60Hz) For 100V Single phase 100 to 115V AC (50/60Hz) R T 1MCCB Noise filter

E-MY2B_E_A

Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

5 Port Solenoid Valve, Series VQC

or less 52 or less 3-position pressure center (A) 4 (B) 2 6.2 Metal seal VQC4400 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less 280 (0.62) Exhaust center 7.0 Rubber seal VQC4401 7.3 0.38 1.9 0.38 2.0 50 or less 52 or less 6.2 Metal seal VQC4500 6.4 0.18 1.9 0.18 1.6 45 or less 47 or less Pressure center 1 (P) 5 (R1) 3 (R2) 7.0 Rubber seal VQC4501 7.1 0.38 1.9 0.38 2.0 50 or less 52 or less