OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

A_HEC-OM-I009

Circulating fluid circuit -4-3 Fig. 5-1 HEC002-A -5-1 Fig. 5-2 HEC006-A -5-1 Fig. 5-3 Air Filter -5-2 Fig. 5-4 Top view -5-2 Fig. 5-5 Operation panel-5-3 Fig. 5-6 Display -5-3 Fig. 5-7 Reservoir Cap -5-4 Fig. 6-1 Cooling capacity -6-2 Fig. 6-2 Heating capacity -6-2 Fig. 6-3 Pump capacity -6-3 Fig. 9-1 Alarm indication in the event ERR14 arises -9-1 Fig. 9-2 Alarm indication in the event ERR14

MQQ

on page 10-5-20.

MQQ

on page 10-5-20.

SMC Pneumatic Clean Series

D-C73 D-H7B D-H7A1 Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 5 to 40 mA 40 mA or less Refer to page 182 for a list of applicable auto switches.

Air Slide Table Series MXP

5 5 5 5 A A 3 3 3.5 3 3 MXH A B MXU Minimum Auto Switch Mounting Stroke Electrical entry from inside (mm) MXS B C Applicable auto switch model No. of auto switches mounted MXQ D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV MXF 1 pc. 2 pcs. 5 10 5 10 5 5 B D MXW MXJ Parallel electrical entry B A Auto Switch Mounting MXP MXY Caution MTS A D Auto Switch Mounting Tool Use the watchmakers screwdriver with

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

E-MY2B_E_A

Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

Flow Control Equipment

0 0 5 10 0 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) Note) "-U10/32" is the same as "M5".

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

ITV

Regulating pressure range, by unit of standard measured pressure S1 S2 Preset pressure Unit OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 ITV01 ITV03 Regulating pressure range ITV05 MPa kgf/cm 2 0.005 to 0.9 0.05 to 9 0.05 to 9 0.7 to 130 5 to 900 0.005 to 0.5 0.05 to 5 0.05 to 5 0.7 to 70 5 to 500 0.005 to 0.1 0.05 to 1 0.05 to 1 0.7 to 15 5 to 100 For safety reasons, it is recommended that one

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Air Slide Table Series MXQ

Note 5) Refer to pages 33 and 35 for dimensions.

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

New

Q F 300 Bracket a h e R C E d g R C E j f J J J IN OUT IN OUT 2 x M Depth 5 H 2 x M Depth 5 G A H i G A 2 x P Port size B1 B b B1 B 2 x P Port size DIN terminal Cable 6 to 12 G1/2 Q F S Bracket mounting hole dimensions D a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) (44) 31.5 6.5 R C E 10.5 IN OUT 2 x M Depth 5 G A H 2 x P Port size B1 B (mm) A B B1 C D E F G Port size P H J M Model 3 A 4

3

Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min 300 to 6000 L/min 20 to 2000 L/min 20 to 200 L/min 600 to 12000

Low Friction Cylinders Series MQ

5 !0 !1 !