17

Shock absorber Lock plate 1191 MY1B Series Construction 25, 32, 40 MY1B25 to 40 r @3 @9 y u t !5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Vacuum Pad: Ball Joint Type

50 +40 +25 +52 722 Lateral Vacuum Entry: With Buffer ZPR Series ZPR FJ K10-0-A14 (With buffer) 40 50 S Width across flats 10 Width across flats 10 S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

-APm-S M12, 5 pins, A-coded, Socket, Straight 1 m, 5 m PROFINET @7 EX500-APm-A M12, 5 pins, A-coded, Socket, Angle EtherCAT K @8 PCA-140180m M12, 5 pins, A-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet EX260 PROFIBUS DP CC-Link @9 EX9-ACm-1 M12, 5 pins, B-coded, Socket, Straight 1 m, 3 m, 5 m K #0 PCA-140180m M12, 5 pins, B-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet

7.5

Note AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 1.5 m 3 m 5 m Conductor resistance /km, 20C 65 or less Cable 25 cores x 24AWG Withstand pressure V, 1 min, AC 1000 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.

21

A1 E1 L L1 MM ND NX NZ R1 U1 A Part no. size Applicable bore size Type C9 for axis Y-020B Y-032B Y-040B 20 25, 32 40 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 46 16 20 25 36 M8 x 1.25 9 9 18 5 14 CDP-1 48 18 20 25 38 M10 x 1.25 9 9 18 5 14 CDP-1 Type C9 for axis 68 22 24 49.7 55 M14 x 1.5 12 16 38 13 25 CDP-3 3 x 18 l A knuckle pin and retaining rings (split pins for 40) are included.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

HRL

Cooling Capacity HRL100-Am-40 (CH1)*1 HRL200-Am-40 (CH1)*1 30 14 12 Ambient temperature 32C 25 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 20 8 15 6 10 4 Ambient temperature 45C Ambient temperature 45C 5 2 0 0 5 20 10 15 25 30 35 5 20 10 15 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRL300-Am-40 (CH1)*1 HRL100/200/300-Am-40 (CH2

Refrigerated Air Dryers

Refer to pages 22 and 25.

HRX-OM-S004

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10

4/5 Port Air Operated Valve Series SYJA3000

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R2) 5 (R1) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-25 Series SYJA7000 Specifications Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 Fluid 2 position single Operating pressure

HRX-OM-T002

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid

REC

20 100V CE1 PLC D-C73C 5 to 40 24V DC AC DC CE2 D-C80C IC circuit, Relay, PLC 50 24Vor less D-B53,A33 5 to 50 24V DC PLC ML2B 5 to 50 24V DC D-B54 D-A34 D-A44 5 to 25 100V AC ML1C 5 to 12.5 200V AC AC DC 50 Relay, PLC 24Vor less REA D-B64 25 100V AC 12.5 200V AC REC 5 to 40 2 color** D-B59W 24V DC RHC * Use contact protection box when using "D-C7" or "D-C8" type in the following conditions

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

48

Refer to the standard model numbers. 12 (10 x 2) 5 to 95 16 (12 x 2) 20 (16 x 2) 5 to 145 25 (20 x 2) 32 (25 x 2) Applicable stroke [mm] 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) Refer to pages 10 and 11 for cylinders with auto switches. 5 to 195 Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height Minimum Stroke for Auto Switch Mounting

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G E (g6) F (h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 14 1 19.5 29 22 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0 0.043 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 5 12 21.2 18 1.5 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 6 14 1.5 34.5 25 20 42 17 10 0.5

Compact Cylinder with Lock Series CLQ

9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) VH1 W1 X H1 H2 L1 C1 20.5 23 12 14.5 14 17.5 12 15 M8 x 1.25 M10 x 1.25 5 6 18.5 22.5 20 25 20 25 7 Compact Cylinder with Lock Series CLQ Dimensions/20, 25 Foot type: CLQL/CDLQL Special cap bolt L G B + Stroke Foot type (mm) LY LH S Stroke range Without auto

HRX-OM-R005

-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz 9.5.1 HRS060-A-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 1500 e e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030