High Power Cylinder Series RHC

13 90 20 23 61 25 75 95 40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308

Flow Control Equipment

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

C95Series

).1A or less 24 VDC 10).1A or less 24 VDC: lmA or less 100 VAC: 1mA or less 200 VAC: 1.5mA or less Indlcetor lamp.

C92

136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97

EX120/121/122

1 10 Connector for unit (Plug) o !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

The minimum order quantity is 10 pieces. Order in multiples of 10.

LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

0.4

10 pieces.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

Fieldbus system EtherNet/IP compatible SI Unit

Auto 10 HDX Selects the required communication speed and communication method 10 PORT1 port setting 10 FDX Unit 100 HDX 100 FDX Sets the communication speed and communication method of PORT2.

HRS100/150

Note 9) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 120) Item 13 * For altitude of 1000 m or higher. 100 A Thermo-chiller Water-cooled 200 V Type Standard Type HRS100/150 Series RoHS HRS How to Order HRS 090 HRS 100/150 HRS 100/150 100 W 20 HRS HRSH 090 Cooling capacity Option 100 10 kW 150 15 kW Cooling method Nil None

0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Selects the required communication speed and communication method 10 HDX 10 BUS IN port setting 10 FDX Unit 100 HDX 100 FDX Auto Sets the communication speed and communication method of BUS OUT.

Low Friction Cylinders Series MQ

79 10 10 ( 9.8) 40 12 55 52 10 7 6 8 10 28 5.4 9 25 10 to 50, 75, 100 96.5 M6 x 1.0 M6 x 1.0 84.5 12 12 (11.8) 45 13.5 Rc 1/8 NPT 1/8 G 1/8 49.5 58 60 10 7 7 4.5 10 12 34 5.5 9 30 10 to 50, 75, 100 116 M8 x 1.25 M6 x 1.0 104 13 16 (15.8) 52 17.5 Rc 1/8 NPT 1/8 G 1/8 57 71 69 10 7 10 5 14 12 40 5.5 9 40 10 to 50, 75, 100 116 M8 x 1.25 M8 x 1.25 104 13 16 (15.8) 64 17.5 Rc 1/4 NPT 1/4

MGQ

54 56 61 74.5 84 9 10 11 13.5 15.5 19 25 25 29 35.5 45.5 55.5 15 21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166

2-Color Display Digital Flow Switch Series PFM

, 525 / For 25 (l/min) 30 15 750 (kPa) 300 (kPa) 300 (kPa) Flow rate (l/min) Flow rate (l/min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40

MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral

Thermo-con

Wetted parts material Stainless steel 304 Single-phase 100 to 240 VAC 10%, 50/60 Hz Power supply Overcurrent protector 10 A Current consumption 3.5 A (100 VAC) to 1.5 A (240 VAC) 5.5 A (100 VAC) to 2.5 A (240 VAC) Alarm Refer to alarm function.

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.