Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Applicable model ZFB100 ZFB100 ZFB200 ZFB200 ZFB300 ZFB300 10 Air suction filter with One-touch fittings Size Tubing size Symbol JIS Symbol 04 4 Metric size Inch size Basic type 06 6 Tubing size Metric size Release button: Blue Symbol 100 200 300 Flow (l/min (ANR)) 20 50 75 08 8 10 " 05 ZFB101 ZFB101 ZFB201 ZFB301 ZFB401 3 16 101 201 301 401 20 30 60 100 Inch size Release button: Red " 07

New

The optimum size for a pressure differential of P 0.4 MPa and a flow of 50 L/min will be the VXZ2 3 A (10 orifice, port size 1/4). 500 400 VXZ2 25 Cv = 12 6 D 300 VXZ2 20 Cv = 9.2 5 C 200 VXZ2 15 Cv = 5.3 4 B Flow rate Q [L/min] 100 VXZ2 Port size 3/8 10 Cv = 2.4 VXZ2 Port size 1/4 10 Cv = 1.9 50 3 A 40 3 A 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3 0.4 0.5 Pressure differential P

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

(Refer to Design and Selection on Specific Product Precautions.) 200 VAC (50/60 Hz) J1 J2 Note 1) 3 Note 3) Normally closed None 110 VAC (50/60 Hz) 4 Note 3) Normally open None 220 VAC (50/60 Hz) Q1 Q2 N1 N2 5 6 Latching positive common Normally closed 24 VDC Latching positive common None 12 VDC Latching negative common Normally closed Note 3) CE compliant products are not available for

Micro Mechanical Valve Series VM1000

M5 x 8 Hexagon socket head cap screw Depth 15 4 x M6 x 1 At lever length 141.2 mm 3 x 1/8 50 T.T. 30 O.T. 20 P.T. 2.3 N F.O.F. 4 x 5.1 mounting hole 2316 5 Port Mechanical Valve Metal Seal Series VZM400 RoHS Specifications Compact design, large flow capacity High cycle rate, long life/300 c.p.m. or less Piping possible to any EXH port.

MB1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

MLGC

speed of 300 mm/sec.

Refrigerated Air dryer Series IDU/IDF

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

MLGC

kinetic energy (J) In terms of specific load conditions, the allowable kinetic energy indicated in the table above is equivalent to a 50% load ratio at 0.5 MPa, and a piston speed of 300 mm/sec.

Free Mount Cylinder

Cylinder Pad (ZP02 to 50) Rod dia. (mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size (mm) Pad (ZPT02 to 50-B4 to 10) Cylinder 4 6 8 10 13 16 20 25 32 40 50 Rod dia. (mm) Model Thread dia.

VCW

1/2: 0.62 3/4: 0.78 4 0.60 14 0.73 1.3 5 0.85 20 0.47 0.7 VCW4 3.0 4 7 1.4 33 0.22 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-52 in model selection regarding port size and orifice size combinations.

Thermo-chiller

Make-up water Current (% of rated current) HRLE050 Item Unit Standard value Influence 4 h 2 h Corrosion Scale generation 1 h pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100*1 to 300*1 v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 30 min 20 min 14 min 10 min Standard item 6 min 4 min Acid consumption amount (at pH4.8) [mg/L] 50

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 19

CP95

, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80

CP95

, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Refer to page 6-13-20 for Minimum Stroke for Auto Switch Mounting. 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80

Slide Unit Series CX2/CXWM/CXWL

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Slide Unit Series CX2/CXWM/CXWL

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 9-15-78