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l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Digital Flow Monitor

Instantaneous flow L/min, cfm (ft3/min) Unit 8 Accumulated flow L, ft3, L106, ft3 x 106 Instantaneous flow -10 to 210 L/min -25 to 525 L/min -50 to 1050 L/min -100 to 2100 L/min -150 to 3150 L/min -300 to 6300 L/min -600 to 12600 L/min Displayable range 0 to 999,999,999 ,999 L Accumulated flow 10 0 to 999,999,999,990 L 0 to 999,999,999,900 L Display Min. setting Instantaneous flow 1 L/min

PSE550/300

(Not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F .S. or less 1.0% F .S. or less 1.5% F .S. or less Accuracy (To display value) (25C) IS Output current: 4 to 20 mA (Within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 ZSM Linearity: 0.2% F .S.

Multistage Ejector Series ZL112.212

Note 2) When analog current output is selected, analog voltage output cannot be used together. 1070 Multistage Ejector Series ZL112 Exhaust Characteristics/Flow Characteristics/Time to Reach Vacuum ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow rate

Mechanically Jointed Rodless Cylinder Series MY1

400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Suction Filter with Case FH99 Series

75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126 50 70 69.9 35.7 30.2 58.7 16.5 8 16.5 1 1/4B 1 1/2B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 2B 250 140 115 218 150 60 90 77.8 42.9 42.9 77.8 21.5 10 21.5 2B 2 1/2B M16 x 2 Thread depth 34 M16 x 2 Thread depth 34 300 170 150 268 180 80 120

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

VCW

(mm) n (stations) Dimensions Model 2 3 4 5 6 7 8 9 10 L1 69 103.5 138 172.5 207 241.5 276 310.5 345 L2 VV2CW2 81 115.5 150 184.5 219 253.5 288 322.5 357 L3 93 127.5 162 196.5 231 265.5 300 334.5 369 L1 77 115.5 154 192.5 231 269.5 308 346.5 385 L2 VV2CW3 89 127.5 166 204.5 243 281.5 320 358.5 397 L3 101 139.5 178 216.5 255 293.5 332 370.5 409 L1 83 124.5 166 207.5 249 290.5 332 373.5 415

2-Color Display Digital Flow Switch Series PFM

(kPa) 300 (kPa) Flow rate (l/min) Flow rate (l/min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number of needle

LEC-OM071xx

When the external regenerative resistors for power are used at the rated load ratio, the resistor temperature increases to between 200 C and 300 C. The resistors must be used at or below the rated values. Check with the manufacturer for the resistors load characteristics.

Compact Guide Cylinder End Lock Type SeriesMGP

Models Standard strokes (mm) 32 40 50 63 MGP 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 M L Intermediate strokes (in 5mm increments) are produced by installing spacers of 5, 10, 15 and 20mm widths. When a special intermediate stroke body is needed, contact SMC.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 8-18-2 in vacuum environments (1.3 x 104 Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) Please consult with SMC if other specifications for surface treatment are required. 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Laser marking Hexagon wrench 8-18-2 8-18-3 3 Series CYV Model Selection 1 Caution on Design (1) The allowable load mass moment differs depending on the workpiece mounting method, cylinder mounting orientation and

VZ100/300/500

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP (Lead wire length) VG G: 300 mm H: 600 mm 3-Rc 1/8 (Piping port) VP S070 X port (For external pilot port) VQ M5 x 0.8 (PE port) VKF VQZ VZ VS M plug connector (M) VZ34-M-01 DIN terminal (D) VZ34-D-01 L plug connector (L) VZ34-L-01 VFN 300 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Stability of suction position,

A B ZP3EB-Y2JB10 65 125 ZP3EB-Y2JB30 90 150 ZP3EB-Y2JB50 110 170 486 B ZP3E Series Ball Joint Assembly/Unit Part No. Ball Joint Assembly Part no. ZP3EA-F1-AL6 [Weight: 27.3 g] Part no.