Plug-in Unit

2 26 or less 20 or less VQC1500 0.70 Metal seal 0.72 0.15 0.16 0.25 0.18 Pressure center 33 or less 25 or less VQC1501 0.85 Rubber seal 0.65 0.20 0.21 0.42 0.18 Dual 3 port valve A B C 1 (P)(R2) 5 (R1) 3 Rubber seal VQC1 01 0.70 0.70 0.20 0.16 0.20 0.16 25 or less 33 or less 2 position double (metal) 2.0 Single VQC2100 2.6 0.15 0.46 0.15 0.60 Metal seal 22 or less 29 or less (A) 4 (B) 2 90

Large blow and

64 25 27.2 33.5 196.8 74.5 6 90 78 6.5 92 47 2.3 42 Rc3/8 76 500 250 310 Note 1) This thread portion is intended to adjust the product characteristics.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

or less (No condensation) 10 to 60 (No freezing) 90 or less (No condensation) Between the housing and SG terminal: 50 (500 VDC) 130 (Screw mounting), 150 (DIN rail mounting) Note 1) Do not use the power supply of inrush current prevention type for the controller input power supply.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

condensation or freezing) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Standards UL/CSA (E216656), CE, RoHS Port size Rc1/4, NPT1/4, G1/4 Piping Materials of parts in contact with fluid Sensor pressure receiving area: Silicon Piping port: C3604 (Electroless nickel plating), O-ring: HNBR Port size Rc1/4 153 g Weight Body Port size NPT1/4 152 g Port size G1/4 150

Thermo-con/Rack Mount Type

Peltier-type Chiller Thermo-con/Rack Mount Type Air-cooled Water-cooled Reduced by approx. 90% (UL Standards) Exhaust heat 2500 W The water-cooled type has been added. (800 W, 1.2 kW) Exhaust heat 250 W RoHS Reduces the amount of exhaust heat by 90% Suppresses rises in the ambient temperature 1.2 kW type Water-cooled 1 kW type Air-cooled Space-saving design with reduced height 267 mm 221

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Set the regulating pressure range for the outlet pressure of the regulator in a range that is 90% or less of the inlet pressure. If set to above 90%, the outlet pressure will be easily affected by fluctuations in the flow rate and inlet pressure, and become unstable. 5.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Set the regulating pressure range for the outlet pressure of the regulator in a range that is 90% or less of the inlet pressure. If set to above 90%, the outlet pressure will be easily affected by fluctuations in the flow rate and inlet pressure, and become unstable. 5.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Set the regulating pressure range for the outlet pressure of the regulator in a range that is 90% or less of the inlet pressure. If set to above 90%, the outlet pressure will be easily affected by fluctuations in the flow rate and inlet pressure, and become unstable. 5.

LV50-OMQ0002

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

HRX-OM-M090

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS012-AApprox. 2 40 20 HRS018-AApprox. 4 70 40 HRS024-A-20 Approx. 5 90 50 The water-refrigerated thermo-cooler discharges heat

HRX-OM-W060

100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump

HRX-OM-Y098

Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150

HRX-OM-X037

Fig. 9-22 Cooling Capacity (HRL100/200-W-40-T2 CH2) HRL Series 9.4 Cooling Capacity 9-19 HRX-OM-X037 Chapter 9 Documents 9.5 Pump Capacity 9.5.1 HRL100-A/W-40 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig.

Rotary Table

Specifications Size 1 2 3 7 Fluid Air (Non-lube) Maximum operating pressure 0.7MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C (with no freezing) Cushion No cushion Lubber cushion Allowable kinetic energy 0.001J 0.0015J 0.002J 0.006J Angle adjustment range 0 to 190 Maximum rotation 190 Rotation time adjustment range 0.2 to 0.7 s/90 0.2 to 0.1 s/90 Cylinder bore

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

VT325

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

With the override in the same position, turn it to the right or left 90 and it will lock. Turn it back 90 to unlock. Construction Principle VS4110 Caution Be sure to unlock it before energizing the valve electrically. VS4210 Description Part no.