MXS Series Air Slide Table 10,20,30,40,50,75,100,125 10,20,30,40,50,75,100,125,150 10,20,30,40,50,75,100,125,150 Stroke adjuster/shock absorber option BS BT With shock absorber at extension end* With shock absorber at retraction end* *Shock absorber option is not available for MXS6 52 Air Slide Table MXS Series Construction/Parts list, Seal list 3 6 8 9 br bs bt bp 7 2 1 bl bk bq 4 bm bn bo 5 ck cp cm cn co cq cs cr
2A-fiO PSI (2-7kgI/ cr:'') Power C,onsumolior 1W (LED: 1.2W / 0.45W (LED:0.5W) Max 120'F(50"C) ' Reclified. + 24VAC auailable as special order. With Bracket Individual pilot exhaust Common exhaust for main & pilot valve (noE) Bracker part numbr (tur douue solenoid lype): VJ3O00-13-1 lf a ctouble solenob lype bracksl is desired for single !
N\,'z3340-OH/CloEed Cr r NIZ344GOG. N\23440-OH/Exhaust Center N\23540-OG.
(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together) Note 1) Fixed SI unit [l/min or l] will be set for switch
amplitude or 98m/s acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) Vibration resistance 980m/s in X, Y, Z directions, 3 times each (de-energized) Impact resistance 0.5% F.S. or less based on 25C Temperature characteristics Power supply/Output connection: 8P connector, Sensor connection: 4P connector Connection Enclosure: PBT; Display: Transparent nylon; Back rubber cover: CR
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80
(FR-BSF01FR-BLF) 11 26 11 (2) (a) () TDKZCAT3035-1330NECTOKIN ESD-SR-250 ZCAT3035-1330(TDK) [] [mm] [mm] 10100MHz 100500MHz 341 391 131 80 150 301 TDK (ZCAT3035-1330) ZCAT3035-1330 (b) () ACAC ON OFF MC MC SK 20cm 20cm ()CR-50500(OKAYA) C R [30%] [mm] AC[V] [F20] 625VAC50/60Hz 60s -2000VAC A W G 1 8 1 5 1 250 0.5 50(1/2W) 3 . 6 50/60Hz 60s C R 5 0 5 0 0 6 1 6 1 3 0 0 m i m 3 0 0
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, OVAL CUP WITH BUFFER, VACUUM PAD, ZP, ZP2, ZP3, M30, 29.34 lb
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, M30
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3, 0.00000 lb
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, Flat Pad w/Ball Spline Buffer, VACUUM PAD, ZP, ZP2, ZP3
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, Oval Pad with Buffer, VACUUM PAD, ZP, ZP2, ZP3
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: BC (B + C), Semi-Standard 1: CR (C + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Body Size: 20, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 01 (1/8), Option: B (Bracket), Semi-Standard 1: CR (C + R), Semi-Standard 2: Standard
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: B (Bracket), Semi-Standard 1: CR (C + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, Adapter, VACUUM PAD, ZP, ZP2, ZP3, M30, 5.00000 lb
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, SPONGE CUP W/ ADAPTER, VACUUM PAD, ZP, ZP2, ZP3, M30, 5.00000 lb
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, FLAT CUP TYPE WITH ADAPTER, VACUUM PAD, ZP, ZP2, ZP3, M30, 0.63000 lb
Sponge pad with adapter, Vertical vacuum inlet direction, Pad material: conductive silicone, conductive CR, Pad O.D.: 4, 6, 8, 10, 15, FLAT CUP TYPE WITH ADAPTER, VACUUM PAD, ZP, ZP2, ZP3, M30, 0.63000 lb