VQ5000

Outstanding response times and long service life kit (Lead wire) F L (Metal seal with light/surge suppressor) kit (D-sub connector) VQ5100 32 mS (Single) Enclosure IP65 compliant Dust tight/Low jetproof type 100 million cycles According to SMC life test conditions VQ5200 17 mS (Double) Accuracy 3 mS Enclosure For applications which demand high speed, high frequency, long life

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 2.2 0.40 0.55 2.6 0.31 0.60 163 (100) 4 position dual N.O./N.O. 2.7 0.24 0.57 2.3 0.36 0.54 Note 1) [ ]: Denotes normal position.

VZ5000

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

Compact Vacuum Unit

SI unit only Note 9) With unit switching function [Initial value psi] Note 8) 14.5 to 14.5 (100 to 100) With unit switching function Note 8) PNP 2 outputs SI unit only Note 9) E/F: Vacuum pressure switch With unit switching function [Initial value psi] Note 8) Note 7) Only the lead wire length 118 inch (3 m) is available for the pressure sensor.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9 0 depth 4.5 2 x 9 through (Hole for mounting body) 2 x M8 x 1.25 thread depth 7 (Mounting thread) 62 When closed E When

Flow Control Equipment

32 to 63 40 to 100 40 to 100 40 to 100 / 1 8 / 1 4 / 1 4 4.1-35 / 3 8 / 1 4 / 3 8 / 1 2 Applicable tube O.D Applicable cylinder bore size (mm) Page Metric size (mm) Inch size (Inch) Model Port size in cylinder side M5 / 1 8 / 5 32 / 3 16 / 1 4 / 5 16 / 3 8 / 1 2 3.2 4 6 8 10 12 With One-touch Fittings/Elbow 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l 1FG-M5 AS22l 1FG-01 AS22l 1FG-

Cylinder with Lock Series CLS

F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 30 Series CLS Selection Graphs Gragh 5 Gragh 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 3000 3000 2000 2000 1000 1000 160 700 800 900 700 800 900 Load weight: m(kg) Load weight: m(kg) 140 600 600 P125 500 500 400 400 160 300 300 140 125 200 200 100 500 400 300 200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 6 Gragh 3

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

application L (mm) RS H A RZQ MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 MI W S 200 320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100

Escapements Series MIW/MIS

MIS25 MIW32 MIS32 200 320 0.7 MPa 500 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa 300 0.2 MPa 160 80 120 200 80 40 100 40 40 120 100 80 60 180 140 100 60 240 200 160 120 80 Point of application L (mm) Point of application L (

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

(N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point of application L (mm) Point of application L (mm) J D-X 20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard)

IZx-OMX0087

Do not touch the A part and the F part of the high voltage connector by hand while handling. Keep the high voltage connector free from contamination. Adhesion of oil or foreign matter on the A part and the F part may cause high voltage electric leakage. If moisture, oil, or foreign matter adheres to the A part, clean it with ethanol.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

How to Order ZFB 100 04 IN/OUT applicable tubing O.D.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 100 3 5 10 20 50 100 1 2 3 4 5 10 20 30 30 100 200 40 50 MY1B m1,m2,m3 max. m1,m2,m3 max.

K35-OMW0030

/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

Digital Pressure Switch ( compatible)

OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 37 Same setting as [F 1] OUT1.

Fieldbus System

E 16 outputs D-sub connector (25 pins) Note1) 2) F 16 outputs Spring type terminal block (32 pins) Note1) 2) DM EX600 P F Digital Input/Output Unit Input/Output type Number of Inputs/Outputs and Connector Symbol Number of inputs Number of outputs Connector Symbol Description P PNP N NPN E 8 inputs 8 outputs D-sub connector (25 pins) Note1) 2) F 8 inputs 8 outputs Spring type terminal block

Coolant Valve

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1