ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

VXA21/22

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.

Thermo-chiller

S Couplers KK Tubing T S Couplers/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Super PFA PFA Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 7 C O N T E N T S HRLE Series Compact Dual/Basic Type

CEx-OMQ0010

DC12~24V 1. 2. 3. 4. 2 CE2 ()CEU2 CEU1 CEU5 0.1mm 2-1 CE2+CEU2 CEU2 CEU2 8 CE2+CEU1CEU5 3 CEU1CEU5 9 2-2 2-2-1 C E 2 B 40 100 Z N R 40 40mm ( mm ) H 50 50mm () 63 63mm 80 80mm J 100 100mm K (mm) 2 S 1 40 25850 25700 n n 50 25800 25650 63 25800 25650 80 25750 25600 100 25750 25600 (mm) 40 1200 950 50 1150 900 63 1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

ZSE F/ISE

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B

Rotary One-touch Fittings Manifold Series KM

N H (Hex.) Applicable tube O.D.

33

P o i n t Refrigeration circuit control system requires the minimum basic essential function. Temperature control system requires the minimum basic essential function. P o i n t According to the amount of heat generated from users equipment, the system turns power ON/ OFF to the compressor and controls the electronic valve.

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Station 1) (Station n) A A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

3 Port Solenoid Valve Rubber Seal Series SY100

(Station 1) (Station n) A A A A 13 13 8.7 7.7 (Pitch) n-M3 x 0.5 (A port) 12.6 P = 10.5 n-M5 x 0.8 (A port) 12.6 P = 10.5 (Pitch) M3 M5 L plug connector (L) M plug connector (M) 31.7 (For AC) 30.4 (For DC) 15.6 39.1 (For DC) 45.6 (For AC) 40 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 26.4 Other dimensions are same as grommet type.

Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) PAF3000 Series

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

Water-cooledThermo-chiller

Option symbol N NPT Fitting N HRW NPT fitting An adapter is included to change the connection parts of circulating fluid piping and facility water piping to NPT thread type. The adapter must be installed by the customer.

 MICRO MIST SEPARATOR REGULATOR 

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.

Pin Cylinders Series CJP2/CJP

Cylinder bore size Applicable bore size Fitting type Connection thread Model KJ23-M3 KJ04-M3 KJ23-M5 KJ04-M5 KJ06-M5 3.2 M3 x 0.5 4 4 One-touch fitting 3.2 6 10 15 M5 x 0.8 4 6 Recommended Speed Controller Applicable bore size (mm) Connection thread Elbow type meter-in Universal type meter-in In-line type meter-in AS1211F-M3-02 M3 AS1001F-02 2 AS1211F-M5-02 M5 AS1211F-M3-23 AS1311F-M3-23

Series SY100 3 Port Solenoid Valve Rubber Seal

(Station 1) (Station n) A A A A 13 13 8.7 7.7 n-M5 X 0.8 (A port) 12.6 P=10.5 (Pitch) n-M3 X 0.5 (A port) 12.6 P=10.5 (Pitch) In case of M3 In case of M5 L plug connector (L) M plug connector (M) 31.7 (In case of AC) 30.4 (In case of DC) 15.6 39.1 (In case of DC) 45.6 (In case of AC) 40 (Indicator light and surge voltage suppressor) (Indicator light and surge voltage suppressor) 26.4 Other

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

02 98 76 58 48 Width across flats 17 18 OUT1 OUT2 10.2 DC (+) DC () 43 1 51.5 (Max. 58.5) IN OUT (34.2) 13 1 IN 3 18 2 x Port size Rc1/4 NPT1/4 2 x 3.4 28 20 8 3 x 2.5 depth 5 PFMB7201S-(N)02L 88 58 48 18 OUT2 OUT1 10.2 DC (+) DC () 13 43 1 51.5 (Max. 58.5) (34.2) 1 IN 3 18 2 x 3.4 IN OUT Width across flats 17 68 2 x Port size Rc1/4 NPT1/4 28 8 8 2 x 2.5 depth 5 10 Series PFMB7 Dimensions

IZx-OMP0064

(n: Integer from 1 to 34) (For 2, 3, 6, 11, 14, 19, 24, 31 and 34 for n, use a standard model.)

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.